公开(公告)号：US20220166406A1

公开(公告)日：2022-05-26

申请号：US17602351

申请日：2020-04-15

申请人： KYOCERA Tikitin Oy

发明人： Ville SAARELA ,  Antti JAAKKOLA ,  Aarne OJA

IPC分类号： H03H9/24 ,  H03H9/02 ,  H03H3/013 ,  B81B3/00 ,  B81B7/02

摘要： A microelectromechanical (MEMS) resonator includes a spring-mass system having a first weight portion (M1), a second weight portion (M2), and a central spring portion (SP) in between the weight portions.

公开(公告)号：US20230133733A1

公开(公告)日：2023-05-04

申请号：US17918389

申请日：2021-03-30

申请人： KYOCERA Tikitin Oy

发明人： Ville SAARELA ,  Antti JAAKKOLA ,  Aarne OJA

IPC分类号： H03H9/24 ,  H03H9/02

摘要： A silicon microelectromechanical system, MEMS, resonator assembly, includes four flexural beam elements forming a rectangular frame, each beam element being connected at an end thereof to an end of a neighboring one of the beam elements. The resonator assembly further includes connection elements for connecting the rectangular frame to at least one mechanical anchor, and the resonator assembly supporting an in-plane flexural collective resonance mode.