公开(公告)号：US06898972B2

公开(公告)日：2005-05-31

申请号：US10344925

申请日：2001-08-06

申请人： Karin Bauer ,  Tanjo Gleissner ,  Konrad Lentner ,  Stefan Sassen ,  Josef Schalk ,  Ralf Voss

发明人： Karin Bauer ,  Tanjo Gleissner ,  Konrad Lentner ,  Stefan Sassen ,  Josef Schalk ,  Ralf Voss

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5712 ,  Y10T29/49007

摘要： A micromechanical rotation speed sensor with a gimbals-mounted structure capable of vibration includes two vibration elements (4, 5) which are swivelled about two axes (A, B) oriented perpendicular toward each other. An excitation unit in the form of an electrode (7) sets the first vibration element (4) into a vibration about the first axis of rotation (A). A read out unit in the form of a read out electrode (8) records a tipping or vibration of the second vibration element (5) about the second axis of rotation (B) as a measure for the rotation speed of the sensor. Additional mass elements (6a, 6b) which are symmetrically aligned are situated on the upper side (2a) and the underside (2b) of the first vibration element (4) which form a rocker. The sensor is manufactured of at least three individually processed wafers which are finally joined together and form a top part (1), a midsection (2) and a bottom part (3).

摘要翻译： 具有能够振动的万向台安装结构的微机械转速传感器包括两个相对于彼此垂直定向的两个轴线（A，B）旋转的振动元件（4,5）。 电极（7）形式的激励单元将第一振动元件（4）设置成围绕第一旋转轴线（A）的振动。 读出电极（8）形式的读出单元记录第二振动元件（5）围绕第二旋转轴线（B）的倾斜或振动，作为传感器旋转速度的量度。 对称配置的附加质量元件（6a，6b）位于形成摇杆的第一振动元件（4）的上侧（2a）和下侧（2b）上。 传感器由至少三个单独处理的晶片制成，其最终接合在一起并形成顶部（1），中部（2）和底部（3）。