公开(公告)号：US06989513B2

公开(公告)日：2006-01-24

申请号：US10465842

申请日：2003-06-20

申请人： Katsuji Arakawa ,  Masahiro Fujii ,  Hiroshi Koeda

发明人： Katsuji Arakawa ,  Masahiro Fujii ,  Hiroshi Koeda

IPC分类号： H05B3/10

CPC分类号： H05B3/148

摘要： A stable and durable heat-generating element and substrate, a method of efficient and highly precise manufacture of same, and equipment utilizing same are obtained. Employing as material a silicon substrate into at least a portion of which boron or another impurity is diffused to impart conductivity, a heater portion, in which are provided one or a plurality of slits the corner portions of which are removed or are rounded, is fabricated integrally on the silicon substrate by etching processes. Simultaneously with this, a depression portion provided below to control the heating state of the heater portion is formed integrally.

摘要翻译： 获得稳定且耐用的发热元件和基板，其高效且高精度制造的方法以及利用其的设备。 将作为材料的硅衬底作为其至少一部分硼或另一杂质扩散以赋予导电性的材料，加热器部分设置有一个或多个切口，其角部被去除或被倒圆形， 通过蚀刻工艺一体地在硅衬底上。 与此同时，下面设置的用于控制加热器部分的加热状态的凹部形成为一体。

公开(公告)号：US20060232655A1

公开(公告)日：2006-10-19

申请号：US11404026

申请日：2006-04-13

申请人： Masahiro Fujii ,  Katsuji Arakawa

发明人： Masahiro Fujii ,  Katsuji Arakawa

IPC分类号： B41J2/39

CPC分类号： B41J2/16 ,  B41J2/14314 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646

摘要： An electrostatic actuator includes a silicon diaphragm, an opposing electrode opposing the diaphragm with intervention of a gap therebetween, and an insulating layer formed on a surface of the diaphragm, opposing the opposing electrode. A voltage is applied between the diaphragm and the opposing electrode. The insulating layer has a laminated structure including a dielectric layer formed of a material having a higher relative dielectric constant than silicon oxide, on the diaphragm, and a surface layer exhibiting higher reduction in surface charge density than that of the dielectric layer, formed on the dielectric layer.

摘要翻译： 静电致动器包括硅隔膜，与隔膜相对的对置电极和介于其间的介质，以及形成在隔膜表面上的与相对电极相对的绝缘层。 在隔膜和相对电极之间施加电压。 绝缘层具有层叠结构，该层压结构包括由隔膜上具有比氧化硅更高的相对介电常数的材料形成的电介质层，以及形成在电介质层上的表面电荷密度降低的表面电荷密度的表面层 电介质层。

公开(公告)号：US07581824B2

公开(公告)日：2009-09-01

申请号：US11295818

申请日：2005-12-07

申请人： Masahiro Fujii ,  Katsuji Arakawa

发明人： Masahiro Fujii ,  Katsuji Arakawa

IPC分类号： B41J2/045

CPC分类号： B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1626

摘要： To provide an electrostatic actuator that generates high pressure under a given voltage and includes an insulating film exhibiting excellent insulation resistance, a droplet discharge head that includes the electrostatic actuator and a method for manufacturing the droplet discharge head, a droplet discharge apparatus that includes the droplet discharge head and has excellent printing performance, and a device that includes the electrostatic actuator and has excellent driving performance. A diaphragm 12, a counter electrode 17 opposite to the diaphragm 12 with a gap interposed therebetween, and an insulating film 16 on a surface of the diaphragm 12 opposite to the counter electrode 17 are included. The insulating film 16 includes at least a dielectric film 16a formed of a substance having a higher relative dielectric constant than silicon oxide.

摘要翻译： 为了提供在给定电压下产生高压的静电致动器，并且包括具有优异的绝缘电阻的绝缘膜，包括静电致动器的液滴喷射头和用于制造液滴喷射头的方法，包括液滴的液滴喷射装置 排出头，具有优异的印刷性能，以及包括静电致动器并且具有优异的驱动性能的装置。 膜片12，与隔膜12相对的间隔相对的对置电极17以及与对置电极17相对的隔膜12的表面上的绝缘膜16。 绝缘膜16至少包括由具有比氧化硅更高的相对介电常数的物质形成的电介质膜16a。

公开(公告)号：US20060125879A1

公开(公告)日：2006-06-15

申请号：US11295818

申请日：2005-12-07

申请人： Masahiro Fujii ,  Katsuji Arakawa

发明人： Masahiro Fujii ,  Katsuji Arakawa

IPC分类号： B41J2/04

CPC分类号： B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1626

摘要： To provide an electrostatic actuator that generates high pressure under a given voltage and includes an insulating film exhibiting excellent insulation resistance, a droplet discharge head that includes the electrostatic actuator and a method for manufacturing the droplet discharge head, a droplet discharge apparatus that includes the droplet discharge head and has excellent printing performance, and a device that includes the electrostatic actuator and has excellent driving performance. A diaphragm 12, a counter electrode 17 opposite to the diaphragm 12 with a gap interposed therebetween, and an insulating film 16 on a surface of the diaphragm 12 opposite to the counter electrode 17 are included. The insulating film 16 includes at least a dielectric film 16a formed of a substance having a higher relative dielectric constant than silicon oxide.

摘要翻译： 为了提供在给定电压下产生高压的静电致动器，并且包括具有优异的绝缘电阻的绝缘膜，包括静电致动器的液滴喷射头和用于制造液滴喷射头的方法，包括液滴的液滴喷射装置 排出头，具有优异的印刷性能，以及包括静电致动器并且具有优异的驱动性能的装置。 膜片12，与隔膜12相对的间隔相对的对置电极17以及与对置电极17相反的隔膜12的表面上的绝缘膜16。 绝缘膜16至少包括由具有比氧化硅更高的相对介电常数的物质形成的电介质膜16a。

公开(公告)号：US07396511B2

公开(公告)日：2008-07-08

申请号：US10626828

申请日：2003-07-25

申请人： Masahiro Fujii ,  Hiroshi Koeda ,  Fumio Takagi

发明人： Masahiro Fujii ,  Hiroshi Koeda ,  Fumio Takagi

IPC分类号： B41J29/38 ,  B41J2/045 ,  B01L3/00

CPC分类号： G01N35/1074 ,  G01N2035/1018 ,  G01N2035/1041 ,  Y10T436/2575

摘要： Proposed is dispensing technology capable of reliably spotting a biological sample on a solid phase. A head chip applies a voltage pulse between a diaphragm and separate electrodes based on a drive control signal output from a head driver IC, and discharges a solution containing protein filled in a pressurized chamber as a result of the elastic deformation of the diaphragm. A drive pulse generation circuit generates a drive voltage pulse and supplies this to the head chip in order to discharge a solution containing protein from the head chip. The drive current detection circuit detects a drive current flowing between the diaphragm and separate electrodes. Since the waveform of the detected drive current and the peak current value and so on differ in the case where the discharge status is normal and in the case where it is abnormal, a defective discharge can be discriminated by detecting such change.

摘要翻译： 提出了能够在固相上可靠地点样生物样品的分配技术。 头片基于从头驱动器IC输出的驱动控制信号在隔膜和分离的电极之间施加电压脉冲，并且由于隔膜的弹性变形而放出包含加压室中的蛋白质的溶液。 驱动脉冲产生电路产生驱动电压脉冲，并将其提供给头部芯片，以便从头部芯片排出含有蛋白质的溶液。 驱动电流检测电路检测在隔膜和分离电极之间流动的驱动电流。 由于在放电状态正常的情况下检测到的驱动电流和峰值电流值等的波形不同，并且在异常的情况下，可以通过检测这种变化来区分不良放电。

公开(公告)号：US5821951A

公开(公告)日：1998-10-13

申请号：US840829

申请日：1997-04-16

申请人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

发明人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

IPC分类号： B41J2/045 ,  B41J2/08 ,  B41J2/14 ,  B41J29/38 ,  B41J2/04 ,  B41J2/095

CPC分类号： B41J2/04541 ,  B41J2/04553 ,  B41J2/04566 ,  B41J2/04573 ,  B41J2/04578 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/08 ,  B41J2/14314

摘要： An ink jet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying voltage to the electrostatic actuator thereby performing printing with ink droplets ejected from the nozzle. The electrostatic actuator driver comprises a timing pulse generator, charge circuit and discharge circuit. The driver controls an amount of charge to be charged to the electrostatic actuator as well as charge rate thereof corresponding to the environmental operating condition of the ink jet printer.

摘要翻译： 一种喷墨打印机，其具有喷墨打印头，喷墨打印头具有喷嘴，连接到喷嘴的油墨通道和静电致动器，其由设置在油墨通道的一部分中的隔膜和放置在外部的电极组成 的墨水通道与隔膜相对。 隔膜由于通过向静电致动器施加电压产生的静电力而变形，从而通过从喷嘴喷射的墨滴进行打印。 静电致动器驱动器包括定时脉冲发生器，充电电路和放电电路。 驱动器控制对静电致动器的充电量以及与喷墨打印机的环境操作条件对应的充电速率。

公开(公告)号：US5734395A

公开(公告)日：1998-03-31

申请号：US481528

申请日：1995-09-11

申请人： Shinichi Kamisuki ,  Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya ,  Masahiro Fujii ,  Naoki Kobayashi

发明人： Shinichi Kamisuki ,  Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya ,  Masahiro Fujii ,  Naoki Kobayashi

IPC分类号： B41J2/045 ,  B41J2/16 ,  B41J2/05

CPC分类号： B41J2/04541 ,  B41J2/04578 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14379 ,  B41J2202/03

摘要： An ink jet head includes a common electrode formed on a semiconductor substrate. A charge is applied to the common electrode and an electrode disposed on another substrate in opposition to a diaphragm formed in the semiconductor substrate to electrostatically deform the diaphragm and eject ink. The common electrode comprises a single layer or multiple layer metallic coating forming ohmic contact on the semiconductor substrate. In addition, a group III or group V element is doped to a high concentration at the area on the semiconductor substrate where the common electrode is formed. The diaphragm can therefore vibrate at high speed. An ink jet head capable of high speed printing can be provided because supply and elimination of the charge to the diaphragm can be accomplished at high speed.

摘要翻译： PCT No.PCT / JP93 / 01849 Sec。 371 1995年9月11日第 102（e）1995年9月11日PCT PCT 1993年12月21日PCT公布。 公开号WO94 / 15791 日期1994年7月21日喷墨头包括形成在半导体衬底上的公共电极。 相对于在半导体衬底中形成的隔膜相对于公共电极和设置在另一衬底上的电极，电荷使隔膜静电变形并喷射墨水。 公共电极包括在半导体衬底上形成欧姆接触的单层或多层金属涂层。 此外，在形成公共电极的半导体衬底上的区域上，将III族或V族元素掺杂到高浓度。 因此隔膜可以高速振动。 可以提供能够高速打印的喷墨头，因为可以高速地实现对隔膜的电荷的供应和消除。

公开(公告)号：US5975668A

公开(公告)日：1999-11-02

申请号：US840827

申请日：1997-04-16

申请人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

发明人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

IPC分类号： B41J2/045 ,  B41J2/08 ,  B41J2/14 ,  B41J29/38 ,  B41J2/04 ,  B41J2/095

CPC分类号： B41J2/04541 ,  B41J2/04553 ,  B41J2/04566 ,  B41J2/04573 ,  B41J2/04578 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/08 ,  B41J2/14314

摘要： An ink jet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying voltage to the electrostatic actuator thereby performing printing with ink droplets ejected from the nozzle. The electrostatic actuator driver comprises a timing pulse generator, charge circuit and discharge circuit. The driver controls an amount of charge to be charged to the electrostatic actuator as well as charge rate thereof corresponding to the environmental operating condition of the ink jet printer.

摘要翻译： 一种喷墨打印机，其具有喷墨打印头，喷墨打印头具有喷嘴，连接到喷嘴的油墨通道和静电致动器，其由设置在油墨通道的一部分中的隔膜和放置在外部的电极组成 的墨水通道与隔膜相对。 隔膜由于通过向静电致动器施加电压产生的静电力而变形，从而通过从喷嘴喷射的墨滴进行打印。 静电致动器驱动器包括定时脉冲发生器，充电电路和放电电路。 驱动器控制对静电致动器的充电量以及与喷墨打印机的环境操作条件对应的充电速率。

公开(公告)号：US5668579A

公开(公告)日：1997-09-16

申请号：US259656

申请日：1994-06-14

申请人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

发明人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Shigeo Sugimura ,  Hiroshi Koeda ,  Naoki Kobayashi ,  Asahiro Oguchi

IPC分类号： B41J2/045 ,  B41J2/08 ,  B41J2/14 ,  B41J29/38 ,  B41J2/04 ,  B41J2/095

CPC分类号： B41J2/04541 ,  B41J2/04553 ,  B41J2/04563 ,  B41J2/04566 ,  B41J2/0457 ,  B41J2/04578 ,  B41J2/04588 ,  B41J2/08 ,  B41J2/14314

摘要： An ink jet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying voltage to the electrostatic actuator thereby performing printing with ink droplets ejected from the nozzle. The electrostatic actuator driver comprises a timing pulse generator, charge circuit and discharge circuit. The driver controls an amount of charge to be charged to the electrostatic actuator as well as charge rate thereof corresponding to the environmental operating condition of the ink jet printer.

摘要翻译： 一种喷墨打印机，其具有喷墨打印头，喷墨打印头具有喷嘴，连接到喷嘴的油墨通道和静电致动器，其由设置在油墨通道的一部分中的隔膜和放置在外部的电极组成 的墨水通道与隔膜相对。 隔膜由于通过向静电致动器施加电压产生的静电力而变形，从而通过从喷嘴喷射的墨滴进行打印。 静电致动器驱动器包括定时脉冲发生器，充电电路和放电电路。 驱动器控制对静电致动器的充电量以及与喷墨打印机的环境操作条件对应的充电速率。

公开(公告)号：US5644341A

公开(公告)日：1997-07-01

申请号：US350912

申请日：1994-12-07

申请人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Hiroshi Koeda ,  Keiichi Mukaiyama ,  Hiroyuki Maruyama ,  Noriyoshi Otsuki ,  Toshiaki Watanabe ,  Naoki Kobayashi

发明人： Masahiro Fujii ,  Ikuhiro Miyashita ,  Hiroshi Koeda ,  Keiichi Mukaiyama ,  Hiroyuki Maruyama ,  Noriyoshi Otsuki ,  Toshiaki Watanabe ,  Naoki Kobayashi

IPC分类号： B41J2/045 ,  B41J2/14 ,  B41J29/38

CPC分类号： B41J2/04541 ,  B41J2/04578 ,  B41J2/04588 ,  B41J2/14314

摘要： An inkjet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying a first voltage to the electrostatic actuator. A second voltage, different than the first voltage, is applied to the actuator to relax the diaphragm and to discharge ejecting ink droplets from the nozzle.

摘要翻译： 一种喷墨打印机，其具有喷墨打印头，喷墨打印头具有喷嘴，连接到喷嘴的墨通道和静电致动器，该静电致动器由设置在墨水通道的一部分中的隔膜和位于墨水通道的外部的电极组成 油墨通道与隔膜相对。 隔膜通过向静电致动器施加第一电压产生的静电力而变形。 将不同于第一电压的第二电压施加到致动器以松弛隔膜并从喷嘴喷出墨滴。