公开(公告)号：US20110219873A1

公开(公告)日：2011-09-15

申请号：US13029520

申请日：2011-02-17

申请人： Kazunori OHTA ,  Masahide Hayashi

发明人： Kazunori OHTA ,  Masahide Hayashi

IPC分类号： G01C19/56

CPC分类号： G01C19/5783 ,  G01C19/56 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/15311 ,  H01L2924/00014

摘要： An angular rate sensor includes a metallic core board having a core meal layer made of a metal plate and a wiring layer including a wiring structure, a semiconductor device for detecting an angular rate fixed on the core metal layer, and a cap fixed to the wiring layer. The semiconductor device for detecting an angular rate is disposed in a hollow chamber formed by the cap and the metallic core board. The metallic core board, the semiconductor device, and the cap are molded with resin. Consequently, the angular rate sensor has a packaging structure in which electromagnetic noise resistance and moisture resistance are improved while stress applied to the semiconductor device for detecting an angular rate is reduced.

摘要翻译： 角速率传感器包括具有由金属板制成的芯粕层的金属芯板和包括布线结构的布线层，用于检测固定在芯金属层上的角速率的半导体器件和固定到布线的帽 层。 用于检测角速率的半导体装置设置在由盖和金属芯板形成的中空室中。 金属芯板，半导体器件和盖子用树脂模制。 因此，角速率传感器具有改善电磁噪声阻抗和耐湿性的封装结构，同时减小了施加到用于检测角速率的半导体器件的应力。