公开(公告)号：US20070163120A1

公开(公告)日：2007-07-19

申请号：US11693431

申请日：2007-03-29

申请人： Kazutaka OKAMOTO ,  Masayuki DOI ,  Hisanori OKAMURA ,  Yasuhisa AONO ,  Manabu KAGAWA ,  Satoshi HIRANO ,  Kinya AOTA

发明人： Kazutaka OKAMOTO ,  Masayuki DOI ,  Hisanori OKAMURA ,  Yasuhisa AONO ,  Manabu KAGAWA ,  Satoshi HIRANO ,  Kinya AOTA

IPC分类号： B23P15/26

CPC分类号： B23K20/1235 ,  B23K20/122 ,  B23P15/26 ,  C23C14/3407 ,  F28F3/12 ,  H01J37/34 ,  H01J37/3497 ,  Y10T29/4935 ,  Y10T29/49353 ,  Y10T29/49391 ,  Y10T29/49393

摘要： The present invention is a cooling plate including a groove, which becomes a passage of a coolant, inside a body, wherein one or more fins are provided inside the groove, wherein the groove is covered with a lid having width larger than the groove, wherein the lid is joined to the body by friction stir welding, and wherein a weld bead formed by: the joining is outside the passage, and the weld bead formed by the joining is formed within the body and further, is characterized by a manufacturing method of a cooling plate that has a first groove, which becomes a passage of a coolant, and a second groove, which has width larger than the first groove and receives a lid on the first groove, inside a body, receives the lid on the second groove, and is joined to the body, the manufacturing method of a cooling plate wherein, while the lid and the body are joined together by the friction stir welding owing to insertion of a-rotation tool having a shoulder and a pin, the joining is performed so that a weld bead formed by the joining may become out of the passage, and furthermore, is characterized in that a target for sputtering is joined to the cooling plate.

摘要翻译： 本发明是一种冷却板，其包括在主体内形成冷却剂通道的槽，其中在槽内设置一个或多个散热片，其中，所述槽被宽度大于所述槽的盖覆盖，其中 通过摩擦搅拌焊接将盖接合到主体，并且其中通过以下方式形成的焊道：通过接合在通道外部，并且通过接合形成的焊道在主体内形成，并且其特征还在于， 具有成为冷却剂通道的第一槽的冷却板和在第一槽内具有宽度大于第一槽并且在第一槽上容纳盖的第二槽，在第二槽中容纳盖 并且连接到主体，冷却板的制造方法，其中，通过由于具有肩部和销的旋转工具的插入而通过摩擦搅拌焊接将盖和主体接合在一起时，进行接合 所以t 通过接合形成的焊道可能会脱离通道，此外，其特征在于，溅射靶与冷却板接合。