公开(公告)号：US20100159122A1

公开(公告)日：2010-06-24

申请号：US12627125

申请日：2009-11-30

申请人： Kazuto Hosoi ,  Kazuyoshi Akiyama ,  Yukihiro Abe ,  Motoya Yamada

发明人： Kazuto Hosoi ,  Kazuyoshi Akiyama ,  Yukihiro Abe ,  Motoya Yamada

IPC分类号： C23C16/44 ,  C23C16/00

CPC分类号： G03G5/04 ,  C23C16/4405 ,  C23C16/4412 ,  C23C16/45591

摘要： The present invention provides a deposition film forming apparatus including a reaction container, an exhaust device and an exhaust gas flow path for causing a material gas to flow from the reaction container to the exhaust device, wherein the exhaust gas flow path includes a portion whose cross section expands with a step with respect to a direction in which the material gas flows and the deposition film forming apparatus further includes a cleaning gas flow device for causing the cleaning gas to directly flow into a region closer to the exhaust device side than the step of the exhaust gas flow path, a deposition film forming method using the deposition film forming apparatus and a method of manufacturing an electrophotographic photosensitive member using the deposition film forming method.

摘要翻译： 本发明提供了一种沉积膜形成装置，其包括反应容器，排气装置和用于使材料气体从反应容器流向排气装置的排气流路，其中废气流路包括交叉 截面相对于材料气体流动的方向以阶梯方式膨胀，并且沉积膜形成装置还包括清洁气体流动装置，用于使清洁气体直接流入比排气装置侧更靠近排气装置侧的区域 废气流路，使用沉积膜形成装置的沉积膜形成方法和使用沉积膜形成方法制造电子照相感光构件的方法。

公开(公告)号：US07157197B2

公开(公告)日：2007-01-02

申请号：US11377388

申请日：2006-03-17

申请人： Makoto Aoki ,  Satoshi Kojima ,  Motoya Yamada ,  Kazuto Hosoi ,  Jun Ohira ,  Hironori Owaki

发明人： Makoto Aoki ,  Satoshi Kojima ,  Motoya Yamada ,  Kazuto Hosoi ,  Jun Ohira ,  Hironori Owaki

IPC分类号： G03G5/147

CPC分类号： G03G5/08278 ,  G03G5/08214 ,  G03G5/08235 ,  G03G5/0825 ,  G03G5/14708

摘要： An electrophotographic photosensitive member is provided which can keep at a minimum the absorption of image exposure light of 380 to 500 nm in wavelength in its surface layer and concurrently can satisfactorily keep electrophotographic properties including resolving power. The electrophotographic photosensitive member has a substrate, and a photoconductive layer and a surface layer in this order provided on the substrate. The surface layer includes an amorphous material composed chiefly of silicon atoms and nitrogen atoms and containing at least oxygen atoms and carbon atoms, and the ratios of the numbers of the respective oxygen atoms, carbon atoms and nitrogen atoms to the total number of oxygen atoms, carbon atoms and nitrogen atoms contained in the amorphous material are each within a specific range.

摘要翻译： 提供一种电子照相感光构件，其可以在其表面层中保持波长为380-500nm的图像曝光光的吸收最小，并且同时可以令人满意地保持包括分辨能力的电子照相特性。 电子照相感光构件具有基板，并且依次设置光电导层和表面层。 表面层包括主要由硅原子和氮原子组成并且至少含有氧原子和碳原子的无定形材料，并且各个氧原子，碳原子和氮原子的数目与氧原子总数的比率， 包含在非晶材料中的碳原子和氮原子各​​自在特定范围内。

公开(公告)号：US20060194131A1

公开(公告)日：2006-08-31

申请号：US11396798

申请日：2006-04-04

申请人： Satoshi Kojima ,  Makoto Aoki ,  Jun Ohira ,  Hironori Owaki ,  Kazuto Hosoi ,  Motoya Yamada

发明人： Satoshi Kojima ,  Makoto Aoki ,  Jun Ohira ,  Hironori Owaki ,  Kazuto Hosoi ,  Motoya Yamada

IPC分类号： G03G5/08 ,  G03G15/00

CPC分类号： G03G5/14704 ,  G03G5/08228 ,  G03G5/08242 ,  G03G5/08257 ,  G03G5/08285

摘要： An electrophotographic photosensitive member is provided minimizing the absorption of image exposure having a short wavelength in a surface layer and keeping good electrophotographic properties including resolving power. The electrophotographic photosensitive member includes a conductive substrate, and a photoconductive layer and a surface region layer sequentially superimposed on the conductive substrate. The surface region layer is composed of a non-single-crystal silicon nitride film containing an Group element in the periodic table and a carbon atom and using at least a silicon atom and a nitrogen atom as base materials. In the surface region layer, the Group 13 element content with respect to the total amount of constituent atoms has distribution having at least two local maximum values in the thickness direction, and an the average concentration of nitrogen atoms is 30 atm % to 70 atm %.

摘要翻译： 提供一种电子照相感光构件，其使表面层中具有短波长的图像曝光的吸收最小化并且保持包括分辨能力的良好电子照相特性。 电子照相感光构件包括导电衬底和顺序叠加在导电衬底上的光电导层和表面区域层。 表面区域由包含元素周期表中的元素元素和碳原子的至少使用硅原子和氮原子的非单晶氮化硅膜构成。 在表面区域中，相对于构成原子的总量的第13族元素含量在厚度方向上具有至少两个局部最大值的分布，氮原子的平均浓度为30atm％〜70atm％ 。

公开(公告)号：US07255969B2

公开(公告)日：2007-08-14

申请号：US11396798

申请日：2006-04-04

申请人： Satoshi Kojima ,  Makoto Aoki ,  Jun Ohira ,  Hironori Owaki ,  Kazuto Hosoi ,  Motoya Yamada

发明人： Satoshi Kojima ,  Makoto Aoki ,  Jun Ohira ,  Hironori Owaki ,  Kazuto Hosoi ,  Motoya Yamada

IPC分类号： G03G5/14

CPC分类号： G03G5/14704 ,  G03G5/08228 ,  G03G5/08242 ,  G03G5/08257 ,  G03G5/08285

摘要： An electrophotographic photosensitive member is provided minimizing the absorption of image exposure having a short wavelength in a surface layer and keeping good electrophotographic properties including resolving power. The electrophotographic photosensitive member includes a conductive substrate, and a photoconductive layer and a surface region layer sequentially superimposed on the conductive substrate. The surface region layer is composed of a non-single-crystal silicon nitride film containing an Group element in the periodic table and a carbon atom and using at least a silicon atom and a nitrogen atom as base materials. In the surface region layer, the Group 13 element content with respect to the total amount of constituent atoms has distribution having at least two local maximum values in the thickness direction, and an the average concentration of nitrogen atoms is 30 atm % to 70 atm %.

摘要翻译： 提供一种电子照相感光构件，其使表面层中具有短波长的图像曝光的吸收最小化并且保持包括分辨能力的良好电子照相特性。 电子照相感光构件包括导电衬底和顺序叠加在导电衬底上的光电导层和表面区域层。 表面区域由包含元素周期表中的元素元素和碳原子的至少使用硅原子和氮原子的非单晶氮化硅膜构成。 在表面区域中，相对于构成原子的总量的第13族元素含量在厚度方向上具有至少两个局部最大值的分布，氮原子的平均浓度为30atm％〜70atm％ 。

公开(公告)号：US20060194132A1

公开(公告)日：2006-08-31

申请号：US11403897

申请日：2006-04-14

申请人： Kazuto Hosoi ,  Satoshi Kojima ,  Jun Ohira ,  Makoto Aoki ,  Motoya Yamada ,  Hironori Owaki

发明人： Kazuto Hosoi ,  Satoshi Kojima ,  Jun Ohira ,  Makoto Aoki ,  Motoya Yamada ,  Hironori Owaki

IPC分类号： G03G5/147

CPC分类号： G03G5/08278 ,  G03G5/08221 ,  G03G5/08228 ,  G03G5/08235 ,  G03G5/08242 ,  G03G5/08257 ,  G03G5/08271 ,  G03G5/14704

摘要： An electrophotographic photosensitive member is provided in which electrophotographic properties including resolving power have been improved with minimized absorption of image exposure light at a short wavelength in a surface layer. The electrophotographic photosensitive member includes a photoconductive layer composed of a non-single-crystal silicon film and a surface region layer composed of a non-single-crystal silicon nitride film containing silicon atoms and nitrogen atoms, superimposed on a conductive substrate. The surface region layer has a gradient-composition layer in which the composition ratio between silicon atoms and nitrogen atoms is changed and a surface layer in which the composition ratio between them is constant. The gradient-composition layer and surface region layer contain a Group 13 element, and the content distribution of the element in the thickness direction of each layer has at least one local maximum value.

摘要翻译： 提供一种电子照相感光构件，其中包括分辨能力的电子照相特性已经通过在表面层中以短波长的图像曝光光的最小化吸收而得到改善。 电子照相感光构件包括由非单晶硅膜构成的光电导层和由含有硅原子和氮原子的非单晶硅氮化物膜构成的表面区域叠加在导电基板上。 表面区域层具有其中硅原子和氮原子之间的组成比改变的梯度组成层和它们之间的组成比恒定的表面层。 梯度组成层和表面区域层含有第13族元素，元素在各层的厚度方向上的含量分布至少具有一个局部最大值。

公开(公告)号：US20060160004A1

公开(公告)日：2006-07-20

申请号：US11377388

申请日：2006-03-17

申请人： Makoto Aoki ,  Satoshi Kojima ,  Motoya Yamada ,  Kazuto Hosoi ,  Jun Ohira ,  Hironori Owaki

发明人： Makoto Aoki ,  Satoshi Kojima ,  Motoya Yamada ,  Kazuto Hosoi ,  Jun Ohira ,  Hironori Owaki

IPC分类号： G03G5/147

CPC分类号： G03G5/08278 ,  G03G5/08214 ,  G03G5/08235 ,  G03G5/0825 ,  G03G5/14708

摘要： An electrophotographic photosensitive member is provided which can keep at a minimum the absorption of image exposure light of 380 to 500 nm in wavelength in its surface layer and concurrently can satisfactorily keep electrophotographic properties including resolving power. The electrophotographic photosensitive member has a substrate, and a photoconductive layer and a surface layer in this order provided on the substrate. The surface layer includes an amorphous material composed chiefly of silicon atoms and nitrogen atoms and containing at least oxygen atoms and carbon atoms, and the ratios of the numbers of the respective oxygen atoms, carbon atoms and nitrogen atoms to the total number of oxygen atoms, carbon atoms and nitrogen atoms contained in the amorphous material are each within a specific range.

摘要翻译： 提供一种电子照相感光构件，其可以在其表面层中保持波长为380-500nm的图像曝光光的吸收最小，并且同时可以令人满意地保持包括分辨能力的电子照相特性。 电子照相感光构件具有基板，并且依次设置光电导层和表面层。 表面层包括主要由硅原子和氮原子组成并且至少含有氧原子和碳原子的无定形材料，并且各个氧原子，碳原子和氮原子的数目与氧原子总数的比率， 包含在非晶材料中的碳原子和氮原子各​​自在特定范围内。

公开(公告)号：US08440377B2

公开(公告)日：2013-05-14

申请号：US12949053

申请日：2010-11-18

申请人： Tomohito Ozawa ,  Motoya Yamada ,  Kazuyoshi Akiyama ,  Daisuke Tazawa

发明人： Tomohito Ozawa ,  Motoya Yamada ,  Kazuyoshi Akiyama ,  Daisuke Tazawa

IPC分类号： G03G5/043

CPC分类号： G03G5/0433 ,  G03G5/08228

摘要： An electrophotographic photosensitive member includes a substrate, a photoconductive layer, an intermediate layer, and a surface layer sequentially formed. The intermediate layer contains silicon, carbon and hydrogen, and a distribution of a hydrogen ratio, which is a ratio of the number of hydrogen atoms to the number of silicon, carbon and hydrogen atoms, in the intermediate layer has a maximum region. A largest hydrogen atomic ratio in the intermediate layer is larger than a hydrogen atomic ratio in the surface layer, and the hydrogen atomic ratio in the surface layer is 0.30 to 0.45. A distribution of a carbon atomic ratio, which is a ratio of the number of carbon atoms to the number of silicon and carbon atoms, in the intermediate layer has a maximum and a minimum region. A carbon atomic ratio in the maximum region is 0.53 to 0.63, a carbon atomic ratio in the minimum region is 0.47 or more, and the maximum hydrogen region in the intermediate layer is partially superimposed on the minimum carbon region.

摘要翻译： 电子照相感光构件包括基底，光电导层，中间层和顺序形成的表面层。 中间层含有硅，碳和氢，中间层中氢原子数与硅原子数，碳原子数和氢原子数之比的氢比分布最大。 中间层中最大的氢原子比大于表面层中的氢原子比，表面层中的氢原子比为0.30〜0.45。 作为中间层的碳原子数与硅原子数与碳原子数的比例的碳原子比的分布具有最大值和最小值。 最大区域的碳原子比为0.53〜0.63，最小区域的碳原子比为0.47以上，中间层的最大氢区域部分地叠加在最小碳区域上。

公开(公告)号：US20110123915A1

公开(公告)日：2011-05-26

申请号：US12949053

申请日：2010-11-18

申请人： Tomohito Ozawa ,  Motoya Yamada ,  Kazuyoshi Akiyama ,  Daisuke Tazawa

发明人： Tomohito Ozawa ,  Motoya Yamada ,  Kazuyoshi Akiyama ,  Daisuke Tazawa

IPC分类号： G03G5/043

CPC分类号： G03G5/0433 ,  G03G5/08228

摘要： The invention is an electrophotographic photosensitive member comprising a substrate, a photoconductive layer, an intermediate layer and a surface layer sequentially formed, wherein the intermediate contains silicon, carbon and hydrogen, a distribution of a hydrogen ratio which is a ratio of the number of hydrogen to the number of silicon, carbon and hydrogen in the intermediate has a maximum region, a largest hydrogen ratio in the intermediate is larger than a hydrogen ratio in the surface, the hydrogen ratio in the surface is 0.30 to 0.45, a distribution of a carbon ratio which is a ratio of the number of carbon to the number of silicon and carbon in the intermediate has a maximum and a minimum region, a carbon maximum region is 0.53 to 0.63, a carbon minimum region is 0.47 or more, and the maximum hydrogen region in the intermediate is partially superimposed on the minimum carbon region.

摘要翻译： 本发明是一种电子照相感光构件，其包括基底，光电导层，中间层和顺序形成的表面层，其中中间体包含硅，碳和氢，氢比分布为氢的数量比 相对于硅的数量，中间体中的碳和氢具有最大区域，中间体中最大的氢比大于表面中的氢比，表面中的氢比为0.30至0.45，碳的分布 作为中间体的碳数与碳数之比的比例为最大和最小的区域，碳最大区域为0.53〜0.63，碳最小区域为0.47以上，最大氢 中间体的区域部分地叠加在最小碳区域上。