公开(公告)号：US5271602A

公开(公告)日：1993-12-21

申请号：US841817

申请日：1992-02-26

Applicant: Kazutoshi Funaba

Inventor： Kazutoshi Funaba

IPC: B01J3/03 ,  C23C14/56 ,  F16K3/12 ,  F16K41/10 ,  F16K51/02 ,  F16K3/18

CPC classification number: B01J3/03 ,  C23C14/568 ,  F16K3/12 ,  F16K41/10 ,  F16K51/02

Abstract: A vacuum gate valve device having a vacuum path includes: a valve casing; a valve body provided in the valve casing, the valve body being allowed to reciprocate between two positions to close and open the vacuum path; a bonnet flange for closing the casing; driving member provided on the bonnet flange for reciprocably driving the valve body, the driving member having a stem shaft which is loosely inserted into a through hole of the bonnet flange and is coupled with the valve body; and a member for isolating a sliding portion of the stem shaft from the vacuum path.

Abstract translation: 具有真空路径的真空闸阀装置包括：阀壳; 阀体，其设置在所述阀壳体中，所述阀体允许在两个位置之间往复运动，以闭合和打开所述真空通路; 用于封闭外壳的发动机罩法兰; 所述驱动构件设置在所述发动机罩法兰上用于往复驱动所述阀体，所述驱动构件具有松动地插入所述发动机罩法兰的通孔中并与所述阀体联接的杆轴; 以及用于将所述杆轴的滑动部分与所述真空路径隔离的构件。