Oscillating system and optical deflector
    1.
    发明授权
    Oscillating system and optical deflector 有权
    振荡系统和光学偏转器

    公开(公告)号:US07817318B2

    公开(公告)日:2010-10-19

    申请号:US11608343

    申请日:2006-12-08

    IPC分类号: G02B26/08

    摘要: Disclosed is an oscillating system arranged so that a gravity center of a movable member and a torsional axis of a resilient support are easily registered with each other to prevent deformation of the movable member due to its dead weight or deviation of deformation from symmetrical deformation, wherein the oscillating system includes a substrate 301, a movable member 302 with hard magnetic members 310 and 311, resilient supports 304 and 305 for supporting the movable member for torsional vibration about a torsional axis 312 with respect to the substrate, and a magnetic field producing device for driving the movable member relative to the substrate, wherein the movable member 302 has recesses 306 and 307, and wherein the hard magnetic members are fixed while their end portions are aligned with end faces 308 and 309 corresponding to the recesses.

    摘要翻译: 公开了一种摆动系统,其布置成使得活动构件的重心和弹性支撑件的扭转轴彼此容易地对准,以防止可变构件由于其自重或对称变形的偏差而变形,其中 振荡系统包括基板301,具有硬磁性构件310和311的可移动构件302,用于支撑可动构件以相对于基板绕扭转轴312扭转振动的弹性支撑件304和305以及磁场产生装置 用于相对于基板驱动可移动部件,其中可移动部件302具有凹部306和307,并且其中硬磁部件的端部与对应于凹部的端面308和309对准而固定。

    Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member
    2.
    发明授权
    Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member 失效
    光学偏转器具有在弹性支撑构件中在可动构件中在与弹性支撑构件的弯曲的中性表面不同的平面中弯曲的中性表面

    公开(公告)号:US07196830B2

    公开(公告)日:2007-03-27

    申请号:US11091630

    申请日:2005-03-29

    IPC分类号: G02B26/08 G02B26/00

    CPC分类号: G02B26/0833

    摘要: An optical deflector including a support substrate, a movable member, a reflective face, and a mounting structure for fixing the support substrate thereto. The movable member is rotatably or swingingly supported by the support substrate through elastic support members. The reflective face is provided on the movable member and deflects light incident thereon when the movable member is swung relatively to the support substrate. In the optical deflector, neutral surfaces of bending in a direction of a normal to the reflective face in the elastic support member and the movable member are not present in the same plane, and the support substrate is fixed to the mounting structure at a face of the support substrate on a side of the neutral surface in the movable member opposite to a side of the neutral surface in the elastic support member.

    摘要翻译: 一种光学偏转器,包括支撑基板,可移动部件,反射面和用于将支撑基板固定到其上的安装结构。 可动构件通过弹性支撑构件由支撑衬底可旋转地或可摆动地支撑。 当可动构件相对于支撑衬底摆动时,反射面设置在可动构件上并偏转入射到其上的光。 在光学偏转器中,在弹性支撑构件和可动构件的反射面的法线方向上弯曲的中性表面不存在于同一平面中,并且支撑基板被固定到安装结构的表面 所述支撑基板在所述可动构件的所述中性面的与所述弹性支撑构件中的所述中性面的侧面相反的一侧。

    Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member
    3.
    发明申请
    Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member 失效
    光学偏转器具有在弹性支撑构件中在可动构件中在与弹性支撑构件的弯曲的中性表面不同的平面中弯曲的中性表面

    公开(公告)号:US20050225822A1

    公开(公告)日:2005-10-13

    申请号:US11091630

    申请日:2005-03-29

    CPC分类号: G02B26/0833

    摘要: An optical deflector including a support substrate, a movable member, a reflective face, and a mounting structure for fixing the support substrate thereto. The movable member is rotatably or swingingly supported by the support substrate through elastic support members. The reflective face is provided on the movable member and deflects light incident thereon when the movable member is swung relatively to the support substrate. In the optical deflector, neutral surfaces of bending in a direction of a normal to the reflective face in the elastic support member and the movable member are not present in the same plane, and the support substrate is fixed to the mounting structure at a face of the support substrate on a side of the neutral surface in the movable member opposite to a side of the neutral surface in the elastic support member.

    摘要翻译: 一种光学偏转器,包括支撑基板,可移动部件,反射面和用于将支撑基板固定到其上的安装结构。 可动构件通过弹性支撑构件由支撑衬底可旋转地或可摆动地支撑。 当可动构件相对于支撑衬底摆动时,反射面设置在可动构件上并偏转入射到其上的光。 在光学偏转器中,在弹性支撑构件和可动构件的反射面的法线方向上弯曲的中性表面不存在于同一平面中,并且支撑基板被固定到安装结构的表面 所述支撑基板在所述可动构件的所述中性面的与所述弹性支撑构件中的所述中性面的侧面相反的一侧。

    Optical deflector and optical instrument using the same
    4.
    发明授权
    Optical deflector and optical instrument using the same 失效
    光学偏转器和光学仪器使用相同

    公开(公告)号:US07423795B2

    公开(公告)日:2008-09-09

    申请号:US11753062

    申请日:2007-05-24

    IPC分类号: G02B26/08

    CPC分类号: G02B26/105 G02B26/085

    摘要: An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

    摘要翻译: 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。

    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    5.
    发明申请
    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME 失效
    光学偏光仪和使用该光学仪器的光学仪器

    公开(公告)号:US20070279720A1

    公开(公告)日:2007-12-06

    申请号:US11753057

    申请日:2007-05-24

    IPC分类号: G02B26/08

    CPC分类号: G02B26/105

    摘要: An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.

    摘要翻译: 光学偏转器包括支撑件,具有光偏转元件的第一可移动元件,至少一个第二可移动元件,至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧,用于围绕振荡轴线的扭转振动, 至少一个第二扭转弹簧,其构造成支撑所述第二可移动元件和所述支撑构件,以围绕所述振荡轴线进行扭转振动;以及驱动系统,构造成将驱动力施加到所述第一和第二可移动元件中的至少一个, 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩,并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。

    Optical deflector and optical instrument using the same
    7.
    发明授权
    Optical deflector and optical instrument using the same 失效
    光学偏转器和光学仪器使用相同

    公开(公告)号:US07518774B2

    公开(公告)日:2009-04-14

    申请号:US12146561

    申请日:2008-06-26

    IPC分类号: G02B26/08

    CPC分类号: G02B26/105 G02B26/085

    摘要: An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

    摘要翻译: 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。

    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    8.
    发明申请
    OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME 失效
    光学偏光仪和使用该光学仪器的光学仪器

    公开(公告)号:US20080266632A1

    公开(公告)日:2008-10-30

    申请号:US12146561

    申请日:2008-06-26

    IPC分类号: G02B26/10

    CPC分类号: G02B26/105 G02B26/085

    摘要: An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

    摘要翻译: 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。

    OSCILLATING SYSTEM AND OPTICAL DEFLECTOR
    9.
    发明申请
    OSCILLATING SYSTEM AND OPTICAL DEFLECTOR 有权
    振荡系统和光学偏移器

    公开(公告)号:US20070144867A1

    公开(公告)日:2007-06-28

    申请号:US11608343

    申请日:2006-12-08

    IPC分类号: G02B26/10 G03G15/04 B65G37/00

    摘要: Disclosed is an oscillating system arranged so that a gravity center of a movable member and a torsional axis of a resilient support are easily registered with each other to prevent deformation of the movable member due to its dead weight or deviation of deformation from symmetrical deformation, wherein the oscillating system includes a substrate 301, a movable member 302 with hard magnetic members 310 and 311, resilient supports 304 and 305 for supporting the movable member for torsional vibration about a torsional axis 312 with respect to the substrate, and a magnetic field producing device for driving the movable member relative to the substrate, wherein the movable member 302 has recesses 306 and 307, and wherein the hard magnetic members are fixed while their end portions are aligned with end faces 308 and 309 corresponding to the recesses.

    摘要翻译: 公开了一种摆动系统,其布置成使得活动构件的重心和弹性支撑件的扭转轴彼此容易地对准,以防止可变构件由于其自重或对称变形的偏差而变形,其中 振荡系统包括基板301,具有硬磁性构件310和311的可移动构件302,用于支撑可动构件以相对于基板绕扭转轴312扭转振动的弹性支撑件304和305以及磁场产生装置 用于相对于基板驱动可移动部件,其中可移动部件302具有凹部306和307,并且其中硬磁部件的端部与对应于凹部的端面308和309对准而固定。

    Optical deflector and optical instrument using the same
    10.
    发明授权
    Optical deflector and optical instrument using the same 失效
    光学偏转器和光学仪器使用相同

    公开(公告)号:US07656570B2

    公开(公告)日:2010-02-02

    申请号:US11753057

    申请日:2007-05-24

    IPC分类号: G02B26/08

    CPC分类号: G02B26/105

    摘要: An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.

    摘要翻译: 光学偏转器包括支撑件,具有光偏转元件的第一可移动元件,至少一个第二可移动元件,至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧,用于围绕振荡轴线的扭转振动, 至少一个第二扭转弹簧,其构造成支撑所述第二可移动元件和所述支撑构件,用于围绕所述振荡轴线的扭转振动;以及驱动系统,构造成将驱动力施加到所述第一和第二可移动元件中的至少一个, 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩,并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。