公开(公告)号：US20090283155A1

公开(公告)日：2009-11-19

申请号：US11990138

申请日：2006-08-21

申请人： Kenro Yoshino ,  Shinobu Kamimura

发明人： Kenro Yoshino ,  Shinobu Kamimura

IPC分类号： F16K31/02

CPC分类号： F16K31/1221 ,  F16K31/1264 ,  F16K31/402 ,  F16K41/12 ,  G05D16/185 ,  Y10T137/7761

摘要： The fluid control system according to the present invention is characterized by being provided with a fluid control valve controlling a pressure of a fluid by a pressure operation of a control fluid, a flow rate measuring device measuring a flow rate of the fluid, converting a measurement value of said flow rate to an electrical signal, and outputting it, and a control part outputting a command signal for controlling an opening area of said fluid control valve to said fluid control valve or equipment operating said fluid control valve based on a difference of said electrical signal from said flow rate measuring device and a set flow rate.

摘要翻译： 根据本发明的流体控制系统的特征在于，设置有通过控制流体的压力操作控制流体的压力的流体控制阀，测量流体的流量的流量测量装置， 所述流量与电信号的值的值，并输出;以及控制部，输出用于控制所述流体控制阀的开口面积的指令信号，所述控制信号用于控制所述流体控制阀或操作所述流体控制阀的设备， 来自所述流量测量装置的电信号和设定的流量。

公开(公告)号：US20060285429A1

公开(公告)日：2006-12-21

申请号：US10552308

申请日：2004-04-07

申请人： Shinobu Kamimura ,  Kenro Yoshino

发明人： Shinobu Kamimura ,  Kenro Yoshino

IPC分类号： B01F15/02

CPC分类号： B01F3/088 ,  B01F15/0429 ,  G05D11/03

摘要： A fluid mixer is provided which can supply a fixed amount of fluid in each of supply lines to a mixing line all the time while maintaining a highly accurate mixing ratio even if a pressure on the downstream side of a back pressure valve of the mixing line is fluctuated and moreover can change the mixing ratio of the fluids in the supply lines with high accuracy in the state where the fluids are flowed. On the upstream side from a merging point where at least two supply lines: a first supply line and a second supply line are merged to a mixing line, diaphragm parts for adjusting the flow rates of the fluids and pressure reducing valves are arranged on the further upstream side of the diaphragm parts in series with the supply lines and a back pressure valve is arranged in the mixing line. Also, the back pressure valve and a flow meter are arranged in series in the mixing line, a fixed orifice or an regulating valve is used for the diaphragm parts and the pressure reducing valves and the back pressure valve are automatic valves.

摘要翻译： 提供了一种流体混合器，其可以在每个供给管线中将固定量的流体一直提供给混合管线，同时保持高精度的混合比，即使混合管线的背压阀的下游侧的压力为 并且在流体流动的状态下可以高精度地改变供给管路中的流体的混合比。 在合并点的上游侧，将至少两条供给线：第一供给线和第二供应线并入混合线，将用于调节流体和减压阀的流量的隔膜部件配置在其上 隔膜部分的上游侧与供应管线串联，并且背压阀布置在混合管线中。 此外，背压阀和流量计串联在混合管线中，隔膜部件使用固定孔或调节阀，减压阀和背压阀是自动阀。

公开(公告)号：US07810988B2

公开(公告)日：2010-10-12

申请号：US10552308

申请日：2004-04-07

申请人： Shinobu Kamimura ,  Kenro Yoshino

发明人： Shinobu Kamimura ,  Kenro Yoshino

IPC分类号： B01F15/04

CPC分类号： B01F3/088 ,  B01F15/0429 ,  G05D11/03

摘要： A fluid mixer is provided which can supply a fixed amount of fluid in each of supply lines to a mixing line all the time while maintaining a highly accurate mixing ratio even if a pressure on the downstream side of a back pressure valve of the mixing line is fluctuated and moreover can change the mixing ratio of the fluids in the supply lines with high accuracy in the state where the fluids are flowed. On the upstream side from a merging point where at least two supply lines: a first supply line and a second supply line are merged to a mixing line, diaphragm parts for adjusting the flow rates of the fluids and pressure reducing valves are arranged on the further upstream side of the diaphragm parts in series with the supply lines and a back pressure valve is arranged in the mixing line. Also, the back pressure valve and a flow meter are arranged in series in the mixing line, a fixed orifice or an regulating valve is used for the diaphragm parts and the pressure reducing valves and the back pressure valve are automatic valves.

摘要翻译： 提供了一种流体混合器，其可以在每个供给管线中将固定量的流体一直提供给混合管线，同时保持高精度的混合比，即使混合管线的背压阀的下游侧的压力为 并且在流体流动的状态下可以高精度地改变供给管路中的流体的混合比。 在合并点的上游侧，将至少两条供给线：第一供给线和第二供应线并入混合线，将用于调节流体和减压阀的流量的隔膜部件配置在其上 隔膜部分的上游侧与供应管线串联，并且背压阀布置在混合管线中。 此外，背压阀和流量计串联在混合管线中，隔膜部件使用固定孔或调节阀，减压阀和背压阀是自动阀。

公开(公告)号：US20110030815A1

公开(公告)日：2011-02-10

申请号：US12900054

申请日：2010-10-07

申请人： Toshihiro Hanada ,  Kenro Yoshino

发明人： Toshihiro Hanada ,  Kenro Yoshino

IPC分类号： F16K31/02

CPC分类号： G05D11/132 ,  Y10T137/7761

摘要： An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation.In the system of the present invention, the feed lines 1, 2 are provided with fluid control valves 4, 10 controlling pressures of fluids by pressure operations of control fluids, flow rate measuring devices 3, 9 measuring actual flow rates of the fluids, converting the measured values of the actual flow rates to electrical signals, and outputting the same, and control units 5, 11 outputting command signals for controlling the opening areas of the fluid control valves to the fluid control valves or equipment operating the fluid control valves based on the errors between the measured values of the actual flow rates and flow rate settings. In the system of the present invention, for example, to obtain a washing solution for semiconductor production, hydrofluoric acid or hydrochloric acid is mixed with pure water by a ratio of 1 part to 10 to 200 parts.

摘要翻译： 本发明的目的是提供一种流体混合系统，其能够通过任何比例混合不同线路的流体，并且控制均匀的脉动流体的流量，能够控制甚至脉动流体的流速，结构紧凑，以及 能够安装在狭窄的空间内，并且可以在安装时实现轻松的管道铺设和管道连接。 在本发明的系统中，供给管线1,2设置有流体控制阀4,10，其通过控制流体的压力操作来控制流体的压力，流量测量装置3,9测量流体的实际流速，转换 实际流量与电信号的测量值，并输出相应的测量值;以及控制单元5,11输出命令信号，用于控制流体控制阀的开口面积到基于流体控制阀的流体控制阀或基于 实际流量和流量设置的测量值之间的误差。 在本发明的系统中，例如为了得到半导体制造用洗涤液，将氢氟酸或盐酸与纯水混合1份〜10份〜200份。

公开(公告)号：US07487792B2

公开(公告)日：2009-02-10

申请号：US10584408

申请日：2003-12-25

申请人： Kenro Yoshino ,  Akihiro Tsuzuki

发明人： Kenro Yoshino ,  Akihiro Tsuzuki

IPC分类号： G05D7/01

CPC分类号： F16K17/196 ,  F16K17/22 ,  G05D7/0113 ,  Y10T137/7792 ,  Y10T137/7836

摘要： A constant flow valve has a chamber (6) provided therein with a first diaphragm (8) having a valve member (7), a second diaphragm (9) and a third diaphragm (10). The chamber is divided into a first pressure chamber (11), a second valve chamber (12), a first valve chamber (13) and a second pressure chamber (18). The first pressure chamber has means for applying a constant inward force to the second diaphragm, and the second pressure chamber has means for applying a constant inward force to the third diaphragm. The first valve chamber is communicated with an inlet channel, the second valve chamber has a valve seat (27) corresponding to the valve member, and the valve seat divides the chamber into a bottom valve chamber (14) communicating with the first valve chamber through a communication hole formed in the first diaphragm and a top valve chamber (15) communicating with an outlet channel.

摘要翻译： 恒流阀具有设置有具有阀构件（7）的第一隔膜（8），第二隔膜（9）和第三隔膜（10）的室（6）。 室被分为第一压力室（11），第二阀室（12），第一阀室（13）和第二压力室（18）。 第一压力室具有用于向第二隔膜施加恒定向内的力的装置，并且第二压力室具有用于向第三隔膜施加恒定向内的力的装置。 第一阀室与入口通道连通，第二阀室具有对应于阀构件的阀座（27），并且阀座将腔室分成与第一阀室连通的底阀室（14） 形成在第一隔膜中的连通孔和与出口通道连通的顶阀室（15）。

公开(公告)号：US20070204913A1

公开(公告)日：2007-09-06

申请号：US11646570

申请日：2006-12-28

申请人： Toshihiro Hanada ,  Kenro Yoshino

发明人： Toshihiro Hanada ,  Kenro Yoshino

IPC分类号： G05D7/06

CPC分类号： G05D11/132 ,  Y10T137/7761

摘要： An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation.In the system of the present invention, the feed lines 1, 2 are provided with fluid control valves 4, 10 controlling pressures of fluids by pressure operations of control fluids, flow rate measuring devices 3, 9 measuring actual flow rates of the fluids, converting the measured values of the actual flow rates to electrical signals, and outputting the same, and control units 5, 11 outputting command signals for controlling the opening areas of the fluid control valves to the fluid control valves or equipment operating the fluid control valves based on the errors between the measured values of the actual flow rates and flow rate settings. In the system of the present invention, for example, to obtain a washing solution for semiconductor production, hydrofluoric acid or hydrochloric acid is mixed with pure water by a ratio of 1 part to 10 to 200 parts.

摘要翻译： 本发明的目的是提供一种流体混合系统，其能够通过任何比例混合不同线路的流体，并且控制均匀的脉动流体的流量，能够控制甚至脉动流体的流速，结构紧凑，以及 能够安装在狭窄的空间内，并且可以在安装时实现轻松的管道铺设和管道连接。 在本发明的系统中，供给管线1,2设置有流体控制阀4,10，其通过控制流体的压力操作来控制流体的压力，流量测量装置3,9测量流体的实际流速，转换 实际流量与电信号的测量值，并输出相应的测量值;以及控制单元5,11输出命令信号，用于控制流体控制阀的开口面积到基于流体控制阀的流体控制阀或基于 实际流量和流量设置的测量值之间的误差。 在本发明的系统中，例如为了得到半导体制造用洗涤液，将氢氟酸或盐酸与纯水混合1份〜10份〜200份。

公开(公告)号：US20080029174A1

公开(公告)日：2008-02-07

申请号：US11661388

申请日：2005-08-29

申请人： Kenro Yoshino

发明人： Kenro Yoshino

IPC分类号： G05D7/06

CPC分类号： F16K41/12 ,  G01F1/66 ,  G05D7/0635 ,  Y10T137/2196

摘要： A fluid control system with easy installation in a semiconductor production system etc. and pipe and wiring connections, with reduced pressure loss due to pipe connections, with easy change of arrangement of modules, free from corrosion even using a corrosive fluid for the fluid, and enabling control of the flow rate even with pulsation of the inflowing fluid is provided. The fluid control system of the present invention is characterized by having a flowmeter sensor part having an ultrasonic oscillator generating an ultrasonic wave in a fluid and an ultrasonic oscillator receiving the ultrasonic wave generated from the ultrasonic oscillator and outputting a signal to a flowmeter amplifier and a control valve controlling the state of flow of fluid to a predetermined state by a working pressure, wherein the flowmeter sensor part and the control valve are arranged inside a casing having a fluid inlet and a fluid outlet.

摘要翻译： 一种易于安装在半导体生产系统等中的流体控制系统以及管道和接线连接，由于管道连接而减少了压力损失，容易改变模块的布置，即使使用流体的腐蚀性流体也没有腐蚀，以及 即使流入的流体的脉动也能够实现流量的控制。 本发明的流体控制系统的特征在于具有流量计传感器部分，其具有在流体中产生超声波的超声波振荡器和接收从超声波振荡器产生的超声波的超声波振荡器，并将信号输出到流量计放大器和 控制阀通过工作压力将流体的流量状态控制到预定状态，其中流量计传感器部分和控制阀布置在具有流体入口和流体出口的壳体内。

公开(公告)号：US20070120086A1

公开(公告)日：2007-05-31

申请号：US10587470

申请日：2004-01-29

申请人： Kenro Yoshino ,  Takeshi Hamada

发明人： Kenro Yoshino ,  Takeshi Hamada

IPC分类号： F16K15/00

CPC分类号： F16K7/126 ,  F16K7/16

摘要： A valve (100) includes a body (1) having a valve seat (10) formed therein, a bonnet (2), a diaphragm (3) supporting a valve element (18) abutting against and moving away from the valve seat (10), and an elastic member such as an O-ring (5). The body (1) is formed with an annular groove (13) extending around the valve seat (10), and the diaphragm (3) is provided at the peripheral edge (20) with an annular engagement part (21) formed to have an approximate L-shape in cross-section. The annular engagement part (21) is inserted into the annular groove (13) in a tight state by the elastic member disposed between the bonnet (2) and the annular engagement part (21) of the diaphragm (3).

摘要翻译： 阀（100）包括具有形成在其中的阀座（10）的阀体（1），阀盖（2），支撑阀元件（18）的隔膜（3），所述阀元件抵靠并远离阀座 ）和诸如O形环（5）的弹性构件。 主体（1）形成有围绕阀座（10）延伸的环形槽（13），并且隔膜（3）设置在周缘（20）处，环形接合部分（21）形成为具有 横截面约为L形。 通过布置在阀盖（2）和隔膜（3）的环形接合部分（21）之间的弹性构件将环形接合部分（21）以紧密状态插入环形槽（13）中。

公开(公告)号：US20090266428A1

公开(公告)日：2009-10-29

申请号：US12064415

申请日：2006-08-21

申请人： Kenro Yoshino ,  Takashi Yamamoto

发明人： Kenro Yoshino ,  Takashi Yamamoto

IPC分类号： F16K37/00

CPC分类号： F16K41/103 ,  F16K7/045 ,  F16K7/07 ,  F16K31/1221 ,  G05D16/185 ,  Y10T137/8158

摘要： The fluid control system according to the present invention is characterized by being provided with a fluid control valve changing an opening area of a passage so as to control a flow rate of a fluid, a flow rate measuring device measuring a flow rate of the fluid, converting a measurement value of said flow rate to an electrical signal, and outputting it, and a control part outputting a command signal for controlling an opening area of said fluid control valve to said fluid control valve or a piece of equipment operating said fluid control valve based on a difference between the electrical signal from the flow rate measuring device and a set flow rate as a first characterizing feature.

摘要翻译： 根据本发明的流体控制系统的特征在于，设置有改变通道的开口面积的流体控制阀，以便控制流体的流量，测量流体的流量的流量测量装置， 将所述流量的测量值转换为电信号并将其输出;以及控制部，其输出用于控制所述流体控制阀的开口面积的命令信号到所述流体控制阀或操作所述流体控制阀 基于来自流量测量装置的电信号与设定流量之间的差作为第一特征特征。

公开(公告)号：US07581712B2

公开(公告)日：2009-09-01

申请号：US10587470

申请日：2004-01-29

申请人： Kenro Yoshino ,  Takeshi Hamada

发明人： Kenro Yoshino ,  Takeshi Hamada

IPC分类号： F16K1/00 ,  F16K15/00

CPC分类号： F16K7/126 ,  F16K7/16

摘要： A valve (100) includes a body (1) having a valve seat (10) formed therein, a bonnet (2), a diaphragm (3) supporting a valve element (18) abutting against and moving away from the valve seat (10), and an elastic member such as an O-ring (5). The body (1) is formed with an annular groove (13) extending around the valve seat (10), and the diaphragm (3) is provided at the peripheral edge (20) with an annular engagement part (21) formed to have an approximate L-shape in cross-section. The annular engagement part (21) is inserted into the annular groove (13) in a tight state by the elastic member disposed between the bonnet (2) and the annular engagement part (21) of the diaphragm (3).

摘要翻译： 阀（100）包括具有形成在其中的阀座（10）的阀体（1），阀盖（2），支撑阀元件（18）的隔膜（3），所述阀元件抵靠并远离阀座 ）和诸如O形环（5）的弹性构件。 主体（1）形成有围绕阀座（10）延伸的环形槽（13），并且隔膜（3）设置在周缘（20）处，环形接合部分（21）形成为具有 横截面约为L形。 通过布置在阀盖（2）和隔膜（3）的环形接合部分（21）之间的弹性构件将环形接合部分（21）以紧密状态插入环形槽（13）中。