公开(公告)号：US06710343B2

公开(公告)日：2004-03-23

申请号：US09813858

申请日：2001-03-22

申请人： Kent S. Wood ,  Gilbert G. Fritz ,  Armen M. Gulian ,  Deborah Van Vechten

发明人： Kent S. Wood ,  Gilbert G. Fritz ,  Armen M. Gulian ,  Deborah Van Vechten

IPC分类号： G01J500

CPC分类号： G01J5/12 ,  G01J1/429 ,  H01L31/101

摘要： A fast photon detector with high energy and position resolution, which may be used in the infrared, ultraviolet, EUV, and X-ray ranges includes an absorber, a thermoelectric sensor, a heat sink, all disposed on a dielectric substrate. An absorber receives a photon and transforms the energy of the photon into a change in temperature within the absorber. A thermoelectric sensor is thermally coupled to the absorber. When the absorber receives the photon, the energy of the photon is very quickly transformed into a time dependent temperature difference across the sensor. A heat sink is thermally coupled to the sensor, to maintain the heat flow across the sensor. The absorber, sensor, and heat sink are disposed upon a dielectric substrate, such that the heat transfer from the sensor to the dielectric substrate is much slower than the signal duration.

摘要翻译： 可用于红外，紫外，EUV和X射线范围的具有高能量和位置分辨率的快速光子检测器包括全部设置在电介质基底上的吸收体，热电传感器，散热器。 吸收器接收光子并将光子的能量转换成吸收器内的温度变化。 热电传感器热耦合到吸收器。 当吸收器接收到光子时，光子的能量非常迅速地变换成跨传感器的时间依赖的温度差。 散热器热耦合到传感器，以保持热量流过传感器。 吸收器，传感器和散热器设置在电介质基板上，使得从传感器到电介质基板的热传递比信号持续时间慢得多。