公开(公告)号：US10859369B2

公开(公告)日：2020-12-08

申请号：US16601606

申请日：2019-10-15

Applicant: Keyence Corporation

Inventor： Noriyoshi Yamane ,  Yuichiro Hama

IPC: G01B11/14 ,  G01B11/06 ,  G01B11/25 ,  G02B26/10 ,  G02B26/08 ,  G06T7/70 ,  G03B21/53 ,  G03B21/14

Abstract: To enable scanning using measurement light with a small-sized displacement measuring apparatus. The displacement measuring apparatus includes a MEMS mirror for scanning using measurement light that is output from a light projection lens. The light projection lens has a focus position, at which the measurement light is condensed, at the MEMS mirror or in the vicinity of the MEMS mirror on an optical axis of the measurement light. The measurement light that is reflected at the MEMS mirror spreads in a strip-shaped manner as the measurement light comes close to a measurement region.