公开(公告)号：US20220349813A1

公开(公告)日：2022-11-03

申请号：US17466288

申请日：2021-09-03

Applicant: Keyence Corporation

Inventor： Ryosuke IMAI ,  Kenichiro HIROSE

IPC: G01N21/25 ,  G01N21/31 ,  G02B5/10 ,  G02B19/00

Abstract: An analysis and observation device includes: an electromagnetic wave emitter that emits a primary electromagnetic wave; a reflective object lens having a primary mirror provided with a primary reflection surface reflecting a secondary electromagnetic wave and a secondary mirror provided with a secondary reflection surface receiving and further reflecting the secondary electromagnetic wave; first and second detectors that receive the secondary electromagnetic wave and generate an intensity distribution spectrum; and a controller that performs component analysis of a sample based on the intensity distribution spectrum. A transmissive region through which the primary electromagnetic wave is transmitted is provided at a center of the secondary mirror. The transmissive region transmits the primary electromagnetic wave, which has been emitted from the electromagnetic wave emitter and passed through an opening of the primary mirror, thereby emitting the primary electromagnetic wave along an analysis optical axis of the reflective object lens.

公开(公告)号：US20230280267A1

公开(公告)日：2023-09-07

申请号：US18144875

申请日：2023-05-09

Applicant: Keyence Corporation

Inventor： Ryosuke IMAI ,  Kenichiro HIROSE

IPC: G01N21/25 ,  G02B19/00 ,  G02B5/10 ,  G01N21/31

CPC classification number: G01N21/255 ,  G02B19/0019 ,  G02B5/10 ,  G01N21/31

Abstract: An analysis and observation device includes: an electromagnetic wave emitter that emits a primary electromagnetic wave; a reflective object lens having a primary mirror provided with a primary reflection surface reflecting a secondary electromagnetic wave and a secondary mirror provided with a secondary reflection surface receiving and further reflecting the secondary electromagnetic wave; first and second detectors that receive the secondary electromagnetic wave and generate an intensity distribution spectrum; and a controller that performs component analysis of a sample based on the intensity distribution spectrum. A transmissive region through which the primary electromagnetic wave is transmitted is provided at a center of the secondary mirror. The transmissive region transmits the primary electromagnetic wave, which has been emitted from the electromagnetic wave emitter and passed through an opening of the primary mirror, thereby emitting the primary electromagnetic wave along an analysis optical axis of the reflective object lens.