TILT MIRROR
    1.
    发明申请
    TILT MIRROR 审中-公开
    倾斜镜

    公开(公告)号:US20090310202A1

    公开(公告)日:2009-12-17

    申请号:US12471272

    申请日:2009-05-22

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0858

    摘要: A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.

    摘要翻译: 公开了一种倾斜镜。 倾斜镜可以包括:反射部分,其可以反射入射光; 第一悬臂,其可以形成在反射部分的任一端上,并且可以在一个方向上产生应力; 第二悬臂,其可以形成在第一悬臂旁边的反射部分的任一端上,并且可以在另一方向上产生应力; 以及连接器部分,其可以将反射部分与第一悬臂的一端和第二悬臂的一端连接,使得沿一个方向产生的应力和在另一个方向上产生的应力被传递到反射部分。 倾斜镜提供了可用于改变光线路径的简单组合。

    MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER
    2.
    发明申请
    MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER 审中-公开
    具有温度补偿层的MEMS结构和光学调制器

    公开(公告)号:US20090067034A1

    公开(公告)日:2009-03-12

    申请号:US12060017

    申请日:2008-03-31

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0858 G02B7/008

    摘要: An optical modulator can be provided that includes a substrate; an insulation layer positioned on the substrate; a ribbon layer such that its center portion is spaced apart from the insulation layer; a piezoelectric actuator positioned on either end of the ribbon layer that provides the driving force which moves the center portion of the ribbon layer vertically; and a temperature compensation layer, which is made of a thermally contracting material having a negative coefficient of expansion, and which is formed on at least one position of an upper portion of the piezoelectric actuator, a lower portion of the piezoelectric actuator, and a lower surface of the ribbon layer corresponding to a position of the piezoelectric actuator. In the optical modulator, the problem of thermal deformation due to rises in temperature can be resolved, whereby the accuracy and reliability of operation of the component can be increased.

    摘要翻译: 可以提供包括基板的光学调制器; 位于基板上的绝缘层; 带状层,使得其中心部分与绝缘层间隔开; 定位在带状层的任一端的压电致动器,其提供使带状层的中心部分垂直移动的驱动力; 以及温度补偿层,其由具有负膨胀系数的热收缩材料制成,并且形成在压电致动器的上部的至少一个位置,压电致动器的下部和下部 带层的表面对应于压电致动器的位置。 在光调制器中,可以解决由于温度升高引起的热变形的问题,从而可以提高部件的操作的精度和可靠性。