Trench isolation type semiconductor device and related method of manufacture
    1.
    发明申请
    Trench isolation type semiconductor device and related method of manufacture 有权
    沟槽隔离型半导体器件及相关制造方法

    公开(公告)号:US20070164391A1

    公开(公告)日:2007-07-19

    申请号:US11650418

    申请日:2007-01-08

    IPC分类号: H01L29/00

    CPC分类号: H01L21/76224

    摘要: A semiconductor device and related method of manufacture are disclosed. The device comprises; a trench having a corner portion formed in the semiconductor substrate, a first oxide film formed on an inner wall of the trench and having an upper end portion exposing the corner portion of the semiconductor substrate, a nitride liner formed on the first oxide film, a second oxide film formed in contact with the upper end of the first oxide film and on the exposed corner portion and an upper surface of the semiconductor substrate, a field insulating film formed on the nitride liner to substantially fill the trench, and a field protecting film formed in contact with the second oxide film and filling a trench edge recess formed between the field insulating film and the second oxide film.

    摘要翻译: 公开了一种半导体器件及其制造方法。 该装置包括: 具有形成在所述半导体衬底中的角部的沟槽,形成在所述沟槽的内壁上并具有暴露所述半导体衬底的角部的上端部的第一氧化膜,形成在所述第一氧化物膜上的氮化物衬垫, 与第一氧化物膜的上端接触形成的第二氧化物膜,暴露的角部和半导体衬底的上表面,形成在氮化物衬垫上以基本上填充沟槽的场绝缘膜,以及场保护膜 形成为与第二氧化物膜接触并填充形成在场绝缘膜和第二氧化物膜之间的沟槽边缘凹陷。

    Methods of Fabricating Halftone Phase Shift Blank Photomasks and Halftone Phase Shift Photomasks
    2.
    发明申请
    Methods of Fabricating Halftone Phase Shift Blank Photomasks and Halftone Phase Shift Photomasks 有权
    制造半色调相移空白光掩模和半色调相移光掩模的方法

    公开(公告)号:US20110104591A1

    公开(公告)日:2011-05-05

    申请号:US12909395

    申请日:2010-10-21

    IPC分类号: G03F1/00

    CPC分类号: G03F1/26 G03F1/32

    摘要: Halftone phase shift photomasks are provided including a substrate configured to transmit light; a shift pattern on the substrate, the shift pattern including a pattern area on a center portion of the substrate and a blind area disposed on a periphery of the substrate, the shift pattern of the blind area having a greater thickness than a thickness that of the pattern area, and being configured to partially transmit the light; and a light shielding pattern formed on the shift pattern in the blind area and being configured to shield the light. Related methods are also provided herein.

    摘要翻译: 提供了半色调相移光掩模,其包括被配置为透射光的基板; 基板上的移动图案,包括基板的中心部分上的图案区域和设置在基板的周边上的盲区的移动图案,盲区的移位图案的厚度大于基板的厚度 图案区域,并且被配置为部分地透射光; 以及遮光图案,其形成在所述遮光区域中的所述移动图案上,并且被构造成屏蔽所述光。 本文还提供了相关方法。

    Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasks
    3.
    发明授权
    Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasks 有权
    制造半色调相移空白光掩模和半色调相移光掩模的方法

    公开(公告)号:US08329363B2

    公开(公告)日:2012-12-11

    申请号:US12909395

    申请日:2010-10-21

    IPC分类号: G03F1/32

    CPC分类号: G03F1/26 G03F1/32

    摘要: Halftone phase shift photomasks are provided including a substrate configured to transmit light; a shift pattern on the substrate, the shift pattern including a pattern area on a center portion of the substrate and a blind area disposed on a periphery of the substrate, the shift pattern of the blind area having a greater thickness than a thickness that of the pattern area, and being configured to partially transmit the light; and a light shielding pattern formed on the shift pattern in the blind area and being configured to shield the light. Related methods are also provided herein.

    摘要翻译: 提供了半色调相移光掩模,其包括被配置为透射光的基板; 基板上的移动图案,包括基板的中心部分上的图案区域和设置在基板的周边上的盲区的移动图案,盲区的移位图案的厚度大于基板的厚度 图案区域,并且被配置为部分地透射光; 以及遮光图案,其形成在所述遮光区域中的所述移动图案上,并且被构造成屏蔽所述光。 本文还提供了相关方法。

    Integrated PCM-CODEC circuit with telemetering noise elimination
    4.
    发明授权
    Integrated PCM-CODEC circuit with telemetering noise elimination 失效
    集成PCM-CODEC电路,具有遥测噪声消除功能

    公开(公告)号:US5341417A

    公开(公告)日:1994-08-23

    申请号:US901757

    申请日:1992-06-22

    摘要: An integrated PCM-CODEC circuit including a plurality of PCM subscriber lines consisting of a SLIC for interfacing a telephone line with a switching system, an impedance conformer and a PCM-CODEC, a common bus for transferring a telephone signal into or from a subscriber according to the time division rule for the timing of telephone line use, a telemetering signal source and a (synchronization signal for controlling portion of the telephone call called by the n'th subscriber. The PCM-CODEC circuit includes a buffer, a signal selector, an applied gain controller, an anti-aliasing filter, a telemetering signal filter, a BPF, a coder, a decoder, a LPF, a received-gain controller, a smoothing filter, an operational amplifier and a telemetering gate.

    摘要翻译: 包括由用于将电话线与交换系统接口的SLIC,阻抗构图器和PCM-CODEC组成的多个PCM用户线的综合PCM-CODEC电路,用于将电话信号传送到用户或从用户传送电话信号的公共总线 对于电话线使用的定时的时分规则,遥测信号源和用于控制第n个用户所呼叫的电话部分的同步信号,PCM-CODEC电路包括缓冲器,信号选择器, 应用增益控制器,抗混叠滤波器,遥测信号滤波器,BPF,编码器,解码器,LPF,接收增益控制器,平滑滤波器,运算放大器和遥测门。