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公开(公告)号:US20250107088A1
公开(公告)日:2025-03-27
申请号:US18884563
申请日:2024-09-13
Applicant: Kioxia Corporation
Inventor: Junpei HASHIMOTO , Takuro URAYAMA , Daigo ICHINOSE , Akiko NOMACHI
Abstract: A semiconductor memory device includes finger structures arranged in a first direction. The finger structures include a first structure and a second structure different in position in a stacking direction. The first structure and the second structure include insulating member rows including insulating members. Among the insulating member rows in the first structure and the second structure of a first finger structure, one closet to a second finger structure includes a first insulating member and a second insulating member. Among the insulating member rows in the first structure and the second structure of the second finger structure, one closet to the first finger structure includes a third insulating member and a fourth insulating member. A distance in the first direction between the first insulating member and the third insulating member is smaller than a distance in the first direction between the second insulating member and the fourth insulating member.