公开(公告)号：US20230258191A1

公开(公告)日：2023-08-17

申请号：US17887788

申请日：2022-08-15

申请人： Kioxia Corporation

发明人： Shogo Hosokai ,  Takayuki Saito ,  Yoshiaki Takahashi ,  Masanori Seki ,  Takayasu Ueno ,  Yuya Maruki

IPC分类号： F04D23/00 ,  F04D25/16 ,  F04D27/00 ,  F04D29/40 ,  F04D29/58 ,  F04D29/70 ,  B08B5/04

CPC分类号： F04D23/008 ,  F04D25/16 ,  F04D27/008 ,  F04D29/403 ,  F04D29/582 ,  F04D29/701 ,  B08B5/04

摘要： A dry vacuum pump regeneration apparatus includes an intake pipe connected to an intake port of a dry vacuum pump; an exhaust pipe connected to an exhaust port of the dry vacuum pump; an auxiliary vacuum pump configured to evacuate an interior of the dry vacuum pump upon being stopped via the exhaust pipe; a plasma generator configured to cause a first gas to pass through the plasma generator to generate a plasma in an atmosphere of the passing first gas, and release a radical of the first gas to the intake port via the intake pipe; a first gas heating device configured to cause a second gas to pass through the first gas heating device, heat the passing second gas, and release the heated second gas to the intake port via the intake pipe; and a bypass pipe connected to the intake pipe and the exhaust pipe.