公开(公告)号：US20210257383A1

公开(公告)日：2021-08-19

申请号：US17010181

申请日：2020-09-02

Applicant: Kioxia Corporation

Inventor： Takamitsu OCHI ,  Shunsuke KASASHIMA

IPC: H01L27/11582

Abstract: A device includes conductor layers and a first pillar, extending through the conductor layers, that includes a first columnar portion, a second columnar portion, and a middle portion between the first and second columnar portions. A diameter of the middle portion is larger than a diameter of the first columnar portion and larger than a diameter of the second columnar portion. The first columnar portion includes a first semiconductor layer and a first charge storage layer. The second columnar portion includes a second semiconductor layer and a second charge storage layer. The middle portion includes a third semiconductor layer. The first and second semiconductor layers are in contact with the third semiconductor layer on a first side and a second side of the third semiconductor layer, respectively. The first charge storage layer is spaced from the second charge storage layer.