Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus
    1.
    发明授权
    Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus 有权
    气体泄漏检测系统,气体泄漏检测方法和半导体制造装置

    公开(公告)号:US06900439B2

    公开(公告)日:2005-05-31

    申请号:US10204322

    申请日:2001-02-23

    CPC分类号: G01N21/3504 G01N2021/3595

    摘要: Components of sampled gases are analyzed by a Fourier transform infrared spectrophotometer 28. It is determined whether or not the analyzed gases include at least one kind of specific gases equal to or more than a predetermined quantity. In a case where mixed gases include at least one kind of the specific gases equal to or more than the predetermined quantity, a controller 30 supplies an operation display monitor 31 with a signal indicating leakage of the kind of the specific gases. Hence, it is possible to realize detection by kind of the gases with high accuracy irrespective of the kind of leaked gas.

    摘要翻译: 取样气体的成分由傅里叶变换红外分光光度计28分析。 确定所分析的气体是否包括等于或大于预定量的至少一种特定气体。 在混合气体包括等于或大于预定量的特定气体中的至少一种的情况下,控制器30向操作显示监视器31提供表示特定气体种类的泄漏的信号。 因此,无论泄漏气体的种类如何,都可以高精度地实现气体的种类的检测。

    Method for the oxidation treatment of decaborane gas
    2.
    发明授权
    Method for the oxidation treatment of decaborane gas 失效
    十硼烷气体氧化处理方法

    公开(公告)号:US5672325A

    公开(公告)日:1997-09-30

    申请号:US590912

    申请日:1996-01-24

    IPC分类号: B01D53/34 B01D53/46

    CPC分类号: B01D53/46 B01D53/346

    摘要: The unwanted or unreacted decaborane gas that results from a boronizing operation using decaborane which is solid at ordinary temperatures but which is heated to a gaseous phase for injection into a vacuum vessel is passed through a metal tube packed with the granules of an alkaline oxidizing agent consisting of potassium permanganate and potassium hydroxide, whereby the decaborane gas is oxidized to solid and gaseous stable substances including manganese compounds and hydrogen. This provides an effective method for removing boron from the boron-containing exhaust gases that result from the coating of the inner surfaces of vacuum vessels in nuclear fusion reactors with an evaporated boron film.

    摘要翻译: 通过使用在常温下为固体,但被加热至气相以进入真空容器的使用十硼烷的硼化操作产生的不需要的或未反应的十硼烷气体通过填充有碱性氧化剂颗粒的金属管 的高锰酸钾和氢氧化钾,由此将十硼烷气体氧化成包括锰化合物和氢的固体和气体稳定物质。 这提供了从具有蒸发的硼膜的核聚变反应器中的真空容器的内表面的涂覆产生的含硼废气中除去硼的有效方法。