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公开(公告)号：US11323823B1
公开(公告)日：2022-05-03
申请号：US17151437
申请日：2021-01-18
Applicant: Knowles Electronics, LLC
Inventor： Shubham Shubham , Hungchien Lin
Abstract: An MEMS acoustic transducer includes a substrate having an opening formed therein, a diaphragm comprising a slotted insulative layer, and a first conductive layer. The slotted insulative layer is attached around a periphery thereof to the substrate and over the opening, and the first conductive layer is disposed on a first surface of the slotted insulative layer. A backplate is separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate.
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