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公开(公告)号：US20240217807A1
公开(公告)日：2024-07-04
申请号：US18090361
申请日：2022-12-28
Applicant: Knowles Electronics, LLC
Inventor： Yunfei Ma , Ann George , Shubham Shubham
IPC: B81B3/00
CPC classification number: B81B3/0008 , B81B2203/0127 , B81B2203/04
Abstract: A microelectromechanical system (MEMS) die includes a substrate, a diaphragm made from a conductive material and supported over the substrate, and a backplate separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate. The backplate includes a central electrode layer disposed on a surface facing the diaphragm, and a ring electrode layer disposed on the surface facing the diaphragm, the ring electrode layer spaced from and surrounding the central electrode layer.
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公开(公告)号：US11323823B1
公开(公告)日：2022-05-03
申请号：US17151437
申请日：2021-01-18
Applicant: Knowles Electronics, LLC
Inventor： Shubham Shubham , Hungchien Lin
Abstract: An MEMS acoustic transducer includes a substrate having an opening formed therein, a diaphragm comprising a slotted insulative layer, and a first conductive layer. The slotted insulative layer is attached around a periphery thereof to the substrate and over the opening, and the first conductive layer is disposed on a first surface of the slotted insulative layer. A backplate is separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate.
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公开(公告)号：US12072350B2
公开(公告)日：2024-08-27
申请号：US17847979
申请日：2022-06-23
Applicant: Knowles Electronics, LLC
Inventor： Faisal Zaman , Shubham Shubham , Ken Deng
IPC: G01P15/125 , G01P1/00
CPC classification number: G01P15/125 , G01P1/00
Abstract: An anchor assembly for a microelectromechanical systems (MEMS) vibration sensor suspension comprises an anchor body and at least one spring integrally extending from the anchor body. Each spring comprises a first section integrally extending at a first end away from the anchor body to a second end, and first lateral portions of second and third sections extending in opposite lateral directions from the second end. Each of the second and third sections includes a first leg that extends at a first end from the first lateral portion toward the anchor body, a second lateral portion that extends from a second end of the first leg away from the first section, and a second leg that extends from the second lateral portion at a first end away from the anchor body, wherein second ends of the second legs extend farther from the anchor body than the first lateral portions.
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公开(公告)号：US11825266B2
公开(公告)日：2023-11-21
申请号：US16982497
申请日：2019-03-20
Applicant: Knowles Electronics, LLC
Inventor： Mohsin Nawaz , Shubham Shubham , David Schafer , Michael Pedersen , Claus Furst , Mohammad Shajaan , Jay Cech
CPC classification number: H04R19/04 , B81B7/02 , B81C1/00341 , G01L9/0072 , G01L19/14 , H04R31/00 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0136 , B81B2207/03 , B81C2201/0109 , B81C2201/0132 , H04R2201/003
Abstract: Microphones including a housing defining a cavity, a plurality of conductors positioned within the cavity, at least one dielectric bar positioned within the cavity, and a transducer diaphragm. The conductors are structured to move in response to pressure changes while the housing remains fixed. A first conductor generates first electrical signals responsive to the pressure changes resulting from changes in an atmospheric pressure. A second conductor generates second electrical signals responsive to the pressure changes resulting from acoustic activity. The dielectric bar is fixed with respect to the cavity and remains fixed under the pressure changes. The dielectric bar is adjacent to at least one of the conductors. In response to an applied pressure that is an atmospheric pressure and/or an acoustic pressure, the transducer diaphragm exerts a force on the housing and displaces at least a portion of conductors with respect to the dielectric bar.
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公开(公告)号：US20230417793A1
公开(公告)日：2023-12-28
申请号：US17847979
申请日：2022-06-23
Applicant: Knowles Electronics, LLC
Inventor： Faisal Zaman , Shubham Shubham , Ken Deng
IPC: G01P15/125 , G01P1/00
CPC classification number: G01P15/125 , G01P1/00
Abstract: An anchor assembly for a microelectromechanical systems (MEMS) vibration sensor suspension comprises an anchor body and at least one spring integrally extending from the anchor body. Each spring comprises a first section integrally extending at a first end away from the anchor body to a second end, and first lateral portions of second and third sections extending in opposite lateral directions from the second end. Each of the second and third sections includes a first leg that extends at a first end from the first lateral portion toward the anchor body, a second lateral portion that extends from a second end of the first leg away from the first section, and a second leg that extends from the second lateral portion at a first end away from the anchor body, wherein second ends of the second legs extend farther from the anchor body than the first lateral portions.
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Patent Agency Ranking
公开(公告)号：US20230192475A1
公开(公告)日：2023-06-22
申请号：US17869870
申请日：2022-07-21
Applicant: Knowles Electronics, LLC
Inventor： Ken Deng , Michael Pedersen , Richard Li-Chen Chen , Shubham Shubham , Faisal Zaman
IPC: B81B3/00 , G01C19/5755 , G01H11/06
CPC classification number: B81B3/0051 , G01C19/5755 , G01H11/06 , B81B2201/0235 , B81B2201/0285 , B81B2203/0163 , B81B2203/0307 , B81B2203/04 , B81B2203/055
Abstract: A vibration sensor/accelerometer includes, in various implementations, a MEMS die that includes a plate having an aperture, an anchor disposed within the aperture, a plurality of arms (e.g., rigid arms) extending from the anchor, and a plurality of resilient members (e.g., looped or folded springs with a carefully designed spring stiffness), each resilient member connecting the plate to an arm of the plurality of arms. The plate may be made from a solid layer in which the resilient members are etched from the same layer. The MEMS die may also include top and bottom wafers, and travel stoppers extending from the top and bottom wafers as well as through the plate.
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公开(公告)号：US20210029470A1
公开(公告)日：2021-01-28
申请号：US16982497
申请日：2019-03-20
Applicant: Knowles Electronics, LLC
Inventor： Mohsin Nawaz , Shubham Shubham , David Schafer , Michael Pedersen , Claus Furst , Mohammad Shajaan , Jay Cech
Abstract: Microphones including a housing defining a cavity, a plurality of conductors positioned within the cavity, at least one dielectric bar positioned within the cavity, and a transducer diaphragm. The conductors are structured to move in response to pressure changes while the housing remains fixed. A first conductor generates first electrical signals responsive to the pressure changes resulting from changes in an atmospheric pressure. A second conductor generates second electrical signals responsive to the pressure changes resulting from acoustic activity. The dielectric bar is fixed with respect to the cavity and remains fixed under the pressure changes. The dielectric bar is adjacent to at least one of the conductors. In response to an applied pressure that is an atmospheric pressure and/or an acoustic pressure, the transducer diaphragm exerts a force on the housing and displaces at least a portion of conductors with respect to the dielectric bar.
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公开(公告)号：US20230388713A1
公开(公告)日：2023-11-30
申请号：US17825804
申请日：2022-05-26
Applicant: Knowles Electronics, LLC
Inventor： Shubham Shubham , Jim Guo
CPC classification number: H04R7/10 , H04R7/16 , H04R1/08 , H04R2201/003
Abstract: A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm, a geometric central region surrounding the geometric center of the diaphragm assembly, and a plurality of pillars connecting the first and second diaphragms, each of the plurality of pillars having a cross-sectional shape having a maximum radial dimension, A, and a maximum circumferential dimension, B, wherein at least a first subset of the plurality of pillars is disposed within the geometric central region and wherein A is greater than B for the at least first sub set.
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公开(公告)号：US11575996B2
公开(公告)日：2023-02-07
申请号：US17286302
申请日：2019-11-26
Applicant: Knowles Electronics, LLC
Inventor： Mohsin Nawaz , Shubham Shubham
Abstract: A diaphragm for use in a transducer, the diaphragm including a flexible layer configured to deflect in response to changes in a differential pressure. The flexible layer includes a lattice grid. The lattice grid includes a first plurality of substantially elongate openings oriented along an axis and a second plurality of substantially elongate openings extending generally parallel to the axis. The second plurality of openings is substantially offset from the first plurality of openings in a direction substantially parallel to the axis. The first plurality of openings and the second plurality of openings define a first plurality of spaced apart grid beams extending between and substantially parallel to the axis and a second plurality of spaced apart grid beams extending substantially perpendicular to the axis. The second plurality of grid beams is configured to connect adjacent ones of the first plurality of grid beams.
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公开(公告)号：US20210345046A1
公开(公告)日：2021-11-04
申请号：US17286302
申请日：2019-11-26
Applicant: Knowles Electronics, LLC
Inventor： Mohsin Nawaz , Shubham Shubham
Abstract: A diaphragm for use in a transducer, the diaphragm including a flexible layer configured to deflect in response to changes in a differential pressure. The flexible layer includes a lattice grid. The lattice grid includes a first plurality of substantially elongate openings oriented along an axis and a second plurality of substantially elongate openings extending generally parallel to the axis. The second plurality of openings is substantially offset from the first plurality of openings in a direction substantially parallel to the axis. The first plurality of openings and the second plurality of openings define a first plurality of spaced apart grid beams extending between and substantially parallel to the axis and a second plurality of spaced apart grid beams extending substantially perpendicular to the axis. The second plurality of grid beams is configured to connect adjacent ones of the first plurality of grid beams.
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