Abstract:
In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent portions is formed by organic electroluminescent material or electrode material. A mask pattern is arranged on a pattern mask moving stage which finely moves in a predetermined direction. The substrate is arranged on a substrate moving stage. The substrate is opposed against the pattern mask with a predetermined pitch. An initial positioning alignment between the substrate and the pattern mask is performed by adjusting the substrate moving stage. The luminescent material is vaporized onto a surface of the substrate through the pattern mask. The luminescent material is vaporized on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate.
Abstract:
An organic EL device including: a substrate; a pair of electrodes having electrode lines and overlying the substrate; and an organic film including at least one light emitting layer disposed between the electrodes, wherein the electrode lines are formed by overlapping part of the electrodes. In the present invention, the minute electrode lines as small as 100 &mgr;m pitch can be formed by vacuum evaporation by use of a patterning mask (metal mask).
Abstract:
An organic EL device including: a substrate; a pair of electrodes having electrode lines and overlying the substrate; and an organic film including at least one light emitting layer disposed between the electrodes, wherein the electrode lines are formed by overlapping part of the electrodes. In the present invention, the minute electrode lines as small as 100 &mgr;m pitch can be formed by vacuum evaporation by use of a patterning mask (metal mask).