ELECTROMECHANICAL CONVERSION ELEMENT, METHOD FOR MANUFACTURING SAME, AND LIQUID DISCHARGE HEAD

    公开(公告)号:US20240081151A1

    公开(公告)日:2024-03-07

    申请号:US18272527

    申请日:2021-02-05

    CPC classification number: H10N30/10516 H10N30/093 H10N30/8554 B41J2/14233

    Abstract: An electromechanical conversion element includes: a first electrode, an electromechanical conversion layer, and a second electrode provided on a substrate; a first high-temperature durable layer that contains a metal oxide between the first electrode and the electromechanical conversion layer; and a second high temperature durable layer that containing a metal oxide between the electromechanical conversion layer and the second electrode. The electromechanical conversion layer contains a perovskite-type crystal. Upon diffraction peak intensities of a (001) plane, a (101) plane, and a (111) plane in X-ray diffraction measurement of the electromechanical conversion layer being I(001), I(101), and I(111), respectively, a degree of orientation of the (001) plane represented by {I(001))/(I(001)+I(101)+I(111)}×100% is 99.0% or more.

    PIEZOELECTRIC ELEMENT, DROPLET DISCHARGE HEAD, FERROELECTRIC MEMORY, AND PIEZOELECTRIC ACTUATOR

    公开(公告)号:US20240244979A1

    公开(公告)日:2024-07-18

    申请号:US18558670

    申请日:2022-05-19

    CPC classification number: H10N30/87 B41J2/14233 H10N30/8554 B41J2002/14258

    Abstract: A piezoelectric element includes a first electrode, a second electrode and a piezoelectric film located between the first electrode and the second electrode. The first electrode is an electrode to which a relatively positive voltage is applied when the first electrode is driven, the second electrode is an electrode to which a relatively negative voltage is applied when the second electrode is driven, and a coefficient A obtained by the following logarithmic approximation formula in an aging test in which an electric field of 10 V/μm is applied at an ambient temperature of 80° C. is equal to or greater than −4.200×10−2.





    Φ
    2

    =


    A
    ×

    ln

    (
    t
    )


    +
    B







    Φ2: Schottky barrier height [eV] between the second electrode and the piezoelectric film when a positive electric field of 12.68 V/μm is applied to the first electrode
    t: Aging period [h]
    A: Coefficient
    B: Coefficient

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