公开(公告)号：US20250089574A1

公开(公告)日：2025-03-13

申请号：US18580606

申请日：2022-09-06

Applicant: Konica Minolta, Inc.

Inventor： Yuji MATSUSHITA ,  Shintaro HARA ,  Hideki MASHIMA

IPC: H10N30/87 ,  B41J2/14 ,  H10B53/30 ,  H10N30/853

Abstract: A piezoelectric element comprising a first electrode, a second electrode, and a lead zirconate titanate film located between the first electrode and the second electrode. The piezoelectric element is formed on a Si substrate whose principal surface is (001) plane. The Si substrate has uniform crystalline orientation in an in-plane direction and an out-of-plane direction. (110) plane of the Si substrate and (100) plane of the lead zirconate titanate film are parallel. In a rocking curve measurement of an X-ray diffraction method, symmetric surface reflection peak of the lead zirconate titanate film obtained by X-rays incident from [100] direction of the Si substrate can be fitted with three component peaks.

公开(公告)号：US20240244979A1

公开(公告)日：2024-07-18

申请号：US18558670

申请日：2022-05-19

Applicant: Konica Minolta, Inc.

Inventor： Yuji MATSUSHITA ,  Shintaro HARA ,  Hideki MASHIMA

IPC: H10N30/87 ,  B41J2/14 ,  H10N30/853

CPC classification number: H10N30/87 ,  B41J2/14233 ,  H10N30/8554 ,  B41J2002/14258

Abstract: A piezoelectric element includes a first electrode, a second electrode and a piezoelectric film located between the first electrode and the second electrode. The first electrode is an electrode to which a relatively positive voltage is applied when the first electrode is driven, the second electrode is an electrode to which a relatively negative voltage is applied when the second electrode is driven, and a coefficient A obtained by the following logarithmic approximation formula in an aging test in which an electric field of 10 V/μm is applied at an ambient temperature of 80° C. is equal to or greater than −4.200×10−2.





Φ
2

=


A
×

ln
⁡
(
t
)


+
B







Φ2: Schottky barrier height [eV] between the second electrode and the piezoelectric film when a positive electric field of 12.68 V/μm is applied to the first electrode
t: Aging period [h]
A: Coefficient
B: Coefficient