Workpiece surface defect detection device and detection method, workpiece surface inspection system, and program

    公开(公告)号:US12236576B2

    公开(公告)日:2025-02-25

    申请号:US17639396

    申请日:2019-10-02

    Abstract: A workpiece surface defect detection device or the like that is capable of stably detecting a small surface defect with high accuracy is provided. A plurality of images indicating a portion to be measured of a workpiece serving as a target of detection of a surface defect is obtained in a state where a bright-and-dark pattern of an illumination device is moved relative to the workpiece, and a tentative defect candidate is extracted. When among a plurality of images from which the tentative defect candidate has been extracted, the number of images including the tentative defect candidate is greater than or equal to a threshold that has been set in advance, the tentative defect candidate is determined as a defect candidate. A plurality of images including the determined defect candidate is combined to generate a composite image, and a defect is detected on the basis of the generated composite image.

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