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公开(公告)号：US08345336B2
公开(公告)日：2013-01-01
申请号：US12681621
申请日：2008-10-02
申请人： Krassimir T. Krastev , Hendrikus W. L. A. M. van Lierop , Hermanus M. J. R. Soemers , Renatus H. M. Sanders
发明人： Krassimir T. Krastev , Hendrikus W. L. A. M. van Lierop , Hermanus M. J. R. Soemers , Renatus H. M. Sanders
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , G02B26/0841
摘要： A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.
摘要翻译： 具有减小的动态变形的MEMS扫描微镜，其具有包括具有旋转轴线58的旋转轴线束120的反射镜支撑件; 平行于旋转轴线58的一对延伸杆56，每个具有第一端140，中点142和第二端144; 和一对X光束130，一对X光束130中的每一个具有十字中点134.一对X光束130中的一个连接到第一端140和每对延伸条56的中点142 ; 一对X梁130中的另一个连接到一对延伸杆56的中点142和第二端144; 并且旋转轴梁120连接到一对X光束130中的每一个的交叉中点134。
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公开(公告)号：US20080316562A1
公开(公告)日：2008-12-25
申请号：US12097600
申请日：2006-12-08
IPC分类号： G02B26/10
CPC分类号： G02B26/0833 , G02B26/10
摘要： A MEMS scanner system and method, the system for deflecting an incident laser beam including a MEMS mirror 26 operable to receive the incident laser beam and to generate a reflected laser beam, and an opaque plate 28 having an aperture 30, the opaque plate 28 being opposite the MEMS mirror 26. The aperture 30 is sized to permit the incident laser beam and the reflected laser beam to pass through the aperture 30.
摘要翻译： MEMS扫描仪系统和方法，用于偏转包括可操作以接收入射激光束并产生反射激光束的MEMS反射镜26的入射激光束的系统和具有孔30的不透明板28，不透明板28是 孔30的尺寸设置成允许入射的激光束和反射的激光束通过孔30。
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