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1.发明授权Method and apparatus for designing patterning system based on patterning fidelity 有权基于图案保真度设计图案化系统的方法和装置公开(公告)号：US08490033B2
公开(公告)日：2013-07-16
申请号：US13478131
申请日：2012-05-23
Applicant: Kuen-Yu Tsai , Sheng-Yung Chen , Hoi-Tou Ng , Shiau-Yi Ma
Inventor： Kuen-Yu Tsai , Sheng-Yung Chen , Hoi-Tou Ng , Shiau-Yi Ma
IPC: G06F17/50
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31761 , H01J2237/31769
Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.
Abstract translation: 提供了一种将图形保真度直接结合到图案化系统的设计中的方法。 根据一组设计参数模拟目标图案的生产结果，以获得模拟图案。 将目标图案与模拟图案进行比较以获得图案保真度，并且根据目标图案保真度来调整图案化系统的设计参数的值，以优化图案化系统的一组设计参数的值 。
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2.发明申请公开(公告)号：US20130024823A1
公开(公告)日：2013-01-24
申请号：US13478131
申请日：2012-05-23
Applicant: Kuen-Yu Tsai , Sheng-Yung Chen , Hoi-Tou Ng , Shiau-Yi Ma
Inventor： Kuen-Yu Tsai , Sheng-Yung Chen , Hoi-Tou Ng , Shiau-Yi Ma
IPC: G06F17/50
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31761 , H01J2237/31769
Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.
Abstract translation: 提供了一种将图形保真度直接结合到图案化系统的设计中的方法。 根据一组设计参数模拟目标图案的生产结果，以获得模拟图案。 将目标图案与模拟图案进行比较以获得图案保真度，并且根据目标图案保真度来调整图案化系统的设计参数的值，以优化图案化系统的一组设计参数的值 。
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