公开(公告)号：US20120112086A1

公开(公告)日：2012-05-10

申请号：US13287290

申请日：2011-11-02

Applicant: Kuen-Yu TSAI ,  Sheng-Yung Chen ,  Jia-Yush Yen ,  Yung-Yaw Chen ,  Chi-Hsiang Fan

Inventor： Kuen-Yu TSAI ,  Sheng-Yung Chen ,  Jia-Yush Yen ,  Yung-Yaw Chen ,  Chi-Hsiang Fan

IPC: G01T1/16 ,  G01J1/42

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G01J1/4228 ,  G01J1/4257 ,  H01J2237/1501 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24528

Abstract: This invention provides a system for estimating change of status of one or a plurality of particle beams, the system comprises a plurality of particle detectors and an estimating unit, wherein one or a plurality of particle beams is being projected to a substrate. The particle detectors detect the one or the plurality particle beams reflected from the substrate to generate one or a plurality of detected signals. The estimating unit estimates change of the status of the one or the plurality of particle beams according to the one or the plurality of detected signals. By such arrangement and estimating method, the system could estimate multiple beams and achieve beam placement accuracy.

Abstract translation: 本发明提供了一种用于估计一个或多个粒子束的状态变化的系统，该系统包括多个粒子检测器和估计单元，其中一个或多个粒子束被投影到基底。 粒子检测器检测从衬底反射的一个或多个粒子束以产生一个或多个检测信号。 估计单元根据一个或多个检测信号估计一个或多个粒子束的状态的变化。 通过这种布置和估计方法，系统可以估计多个波束并实现波束放置精度。

公开(公告)号：US20130297061A1

公开(公告)日：2013-11-07

申请号：US13463685

申请日：2012-05-03

Applicant: Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Shin-Chuan Chen

Inventor： Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Shin-Chuan Chen

IPC: G06F17/50

CPC classification number: G03F7/70975 ,  G03F7/705 ,  G03F7/70591 ,  H01J37/3007 ,  H01J37/3174 ,  H01J2237/1205

Abstract: A method of manufacturing an optical system is described. The method comprises designing at least one performance specification for an optical system, defining at least one fabrication parameter of a component of the optical system, fabricating the component according to the at least one fabrication parameter, obtaining at least one fabrication error of the component during the fabrication process, predicting at least one operation performance of the optical system by simulating with the at least one fabrication error, determining whether the operation performance corresponds with the at least one performance specification, and repeating fabricating the component by using at least one new parameter if the operation performance does not correspond with the at least one performance specification.

Abstract translation: 描述了制造光学系统的方法。 该方法包括设计用于光学系统的至少一个性能规范，限定光学系统的部件的至少一个制造参数，根据至少一个制造参数制造部件，在该系统中获得组件的至少一个制造误差 所述制造过程通过利用所述至少一个制造误差进行模拟来预测所述光学系统的至少一个操作性能，确定所述操作性能是否对应于所述至少一个性能规格，以及通过使用至少一个新参数来重复制造所述部件 如果操作性能不符合至少一个性能规范。

公开(公告)号：US07315239B2

公开(公告)日：2008-01-01

申请号：US11296625

申请日：2005-12-07

Applicant: Yong-Hua Cheng ,  Yun-Yen Chen ,  Chung-Shun Yang ,  Sheng-Yung Chen

Inventor： Yong-Hua Cheng ,  Yun-Yen Chen ,  Chung-Shun Yang ,  Sheng-Yung Chen

IPC: B60Q1/00

CPC classification number: G08G1/163 ,  B60W40/04 ,  G08G1/0967 ,  G08G1/096791

Abstract: A short-range inter-vehicle communication and warning apparatus comprises a forward radar and a backward radar. The apparatus uses the radars to generate Frequency Modulation/Continuous Wave (FMCW) signals, uses amplitude shift keying for data modulation and arranges a special packet format, to realize such a low cost and fast response device of collision avoidance for vehicles. The invention has the dual capabilities of detecting and communicating simultaneously. It can also measure the relative speed of a preceding/rear vehicles and the relative inter-vehicle distance. The invention also exchanges the real-time traffic information with the preceding/rear vehicles at the same time. It is applicable to a one-to-one or one-to-many inter-vehicle channel model.

Abstract translation: 短距离车内通信和警报装置包括前向雷达和后向雷达。 该装置使用雷达生成频率调制/连续波（FMCW）信号，使用幅移键控进行数据调制，并配置特殊的数据包格式，实现了低成本，快速响应的车辆防碰撞装置。 本发明具有同时检测和通信的双重功能。 它还可以测量前后车辆的相对速度和相对车间距离。 本发明还与前/后车辆同时交换实时交通信息。 适用于一对一或一对多车间通道模型。

公开(公告)号：US20120112091A1

公开(公告)日：2012-05-10

申请号：US13286450

申请日：2011-11-01

Applicant: Kuen-Yu Tsai ,  Sheng-Yung Chen

Inventor： Kuen-Yu Tsai ,  Sheng-Yung Chen

IPC: H01J3/14 ,  H01J3/26 ,  B01J19/08 ,  G21K5/00

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G01J1/4228 ,  G01J1/4257 ,  H01J2237/1501 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24528

Abstract: This invention provides a system capable of adjusting status of one or a plurality of particle beams, the system includes a plurality of particle detectors, an estimating unit and a controller, wherein one or a plurality of particle beams are projected to a substrate. The particle detectors detect the one or the plurality of particle beams reflected from the substrate to generate one or a plurality of detector signals in response thereto. The estimating unit estimates status information of the one or the plurality of particle beams by executing a mathematical method according to the one or the plurality of detector signals. The controller adjusts or corrects status of the one or the plurality of particle beams corresponding to the substrate according to the estimated status information of the one or the plurality of particle beams. The substrate is made pattern progressively in a sequence according to a desired pattern.

Abstract translation: 本发明提供一种能够调整一个或多个粒子束的状态的系统，该系统包括多个粒子检测器，估计单元和控制器，其中一个或多个粒子束投射到基底。 粒子检测器检测从衬底反射的一个或多个粒子束，以响应于此产生一个或多个检测器信号。 估计单元通过执行根据一个或多个检测器信号的数学方法来估计一个或多个粒子束的状态信息。 控制器根据一个或多个粒子束的估计状态信息来调整或校正与衬底对应的一个或多个粒子束的状态。 根据期望的图案按顺序逐渐形成基板。

公开(公告)号：US20070096885A1

公开(公告)日：2007-05-03

申请号：US11296625

申请日：2005-12-07

Applicant: Yong-Hua Cheng ,  Yun-Yen Chen ,  Chung-Shun Yang ,  Sheng-Yung Chen

Inventor： Yong-Hua Cheng ,  Yun-Yen Chen ,  Chung-Shun Yang ,  Sheng-Yung Chen

IPC: B60Q1/00 ,  B60Q1/22 ,  G08G1/00

CPC classification number: G08G1/163 ,  B60W40/04 ,  G08G1/0967 ,  G08G1/096791

Abstract: A short-range inter-vehicle communication and warning apparatus comprises a forward radar and a backward radar. The apparatus uses the radars to generate Frequency Modulation/Continuous Wave (FMCW) signals, uses amplitude shift keying for data modulation and arranges a special packet format, to realize such a low cost and fast response device of collision avoidance for vehicles. The invention has the dual capabilities of detecting and communicating simultaneously. It can also measure the relative speed of a preceding/rear vehicles and the relative inter-vehicle distance. The invention also exchanges the real-time traffic information with the preceding/rear vehicles at the same time. It is applicable to a one-to-one or one-to-many inter-vehicle channel model.

Abstract translation: 短距离车内通信和警报装置包括前向雷达和后向雷达。 该装置使用雷达生成频率调制/连续波（FMCW）信号，使用幅移键控进行数据调制，并配置特殊的数据包格式，实现了低成本，快速响应的车辆防撞装置。 本发明具有同时检测和通信的双重功能。 它还可以测量前后车辆的相对速度和相对车间距离。 本发明还与前/后车辆同时交换实时交通信息。 适用于一对一或一对多车间通道模型。

公开(公告)号：US08490033B2

公开(公告)日：2013-07-16

申请号：US13478131

申请日：2012-05-23

Applicant: Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Hoi-Tou Ng ,  Shiau-Yi Ma

Inventor： Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Hoi-Tou Ng ,  Shiau-Yi Ma

IPC: G06F17/50

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31761 ,  H01J2237/31769

Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.

Abstract translation: 提供了一种将图形保真度直接结合到图案化系统的设计中的方法。 根据一组设计参数模拟目标图案的生产结果，以获得模拟图案。 将目标图案与模拟图案进行比较以获得图案保真度，并且根据目标图案保真度来调整图案化系统的设计参数的值，以优化图案化系统的一组设计参数的值 。

公开(公告)号：US20130024823A1

公开(公告)日：2013-01-24

申请号：US13478131

申请日：2012-05-23

Applicant: Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Hoi-Tou Ng ,  Shiau-Yi Ma

Inventor： Kuen-Yu Tsai ,  Sheng-Yung Chen ,  Hoi-Tou Ng ,  Shiau-Yi Ma

IPC: G06F17/50

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31761 ,  H01J2237/31769

Abstract: A method which directly incorporates patterning fidelity into the design of a patterning system is provided. A production result of a target pattern is simulated according to a set of design parameters to obtain a simulated pattern. The target pattern is compared with the simulated pattern to obtain a patterning fidelity, and the values of the set of design parameters of the patterning system are adjusted according to a target patterning fidelity to optimize the values of the set of design parameters of the patterning system.

Abstract translation: 提供了一种将图形保真度直接结合到图案化系统的设计中的方法。 根据一组设计参数模拟目标图案的生产结果，以获得模拟图案。 将目标图案与模拟图案进行比较以获得图案保真度，并且根据目标图案保真度来调整图案化系统的设计参数的值，以优化图案化系统的一组设计参数的值 。

公开(公告)号：US20120112065A1

公开(公告)日：2012-05-10

申请号：US13287281

申请日：2011-11-02

Applicant: Kuen-Yu TSAI ,  Sheng-Yung Chen

Inventor： Kuen-Yu TSAI ,  Sheng-Yung Chen

IPC: H01J37/29 ,  G01J1/42

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G01J1/4228 ,  G01J1/4257 ,  H01J2237/1501 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24528

Abstract: This invention provides an apparatus for estimating change of status of a plurality of particle beams, the apparatus includes a plurality of particle detectors and an estimating unit, wherein the one or the plurality of particle beams is projected to a substrate. The particle detectors detect the one or the plurality of particle beams reflected from the substrate to generate one or a plurality of detector signals. The estimating unit estimates change of the status of the one or the plurality of particle beams by executing a mathematical programming method according to the one or the plurality of detector signals. By such arrangement and monitoring method, the apparatus could estimate the drift of beams.

Abstract translation: 本发明提供了一种用于估计多个粒子束的状态变化的装置，该装置包括多个粒子检测器和估计单元，其中一个或多个粒子束投影到基底。 粒子检测器检测从衬底反射的一个或多个粒子束以产生一个或多个检测器信号。 估计单元通过执行根据一个或多个检测器信号的数学规划方法来估计一个或多个粒子束的状态的变化。 通过这种布置和监测方法，该装置可以估计波束的漂移。