公开(公告)号：US06251472B1

公开(公告)日：2001-06-26

申请号：US08318516

申请日：1994-10-05

Applicant: Kunimi Ohashi

Inventor： Kunimi Ohashi

IPC: B05D314

CPC classification number: C23C14/022 ,  C23C14/042 ,  H01L41/29

Abstract: In a method for forming the electrode pattern of a piezoelectric element for an ultrasonic motor, metal pattern masks made of a metal material of a low expansion coefficient are disposed on the surfaces of piezoelectric elements for the ultrasonic motor, and the electrode patterns are formed on the surfaces of the piezoelectric elements through the metal pattern masks by means of a vacuum evaporation device which is equipped with a physical assistance device for rendering physical assistance with ion beams or ion plating.

Abstract translation: 在形成超声波马达用压电元件的电极图形的方法中，在超声波马达的压电元件的表面配置有由低膨胀系数的金属材料构成的金属图形掩模，并且电极图案形成在 通过金属图案的压电元件的表面通过真空蒸发装置掩蔽，该真空​​蒸发装置配备有用于使离子束或离子电镀物理辅助的物理辅助装置。