Method and apparatus for monitoring the operation of a wafer handling robot
    1.
    发明授权
    Method and apparatus for monitoring the operation of a wafer handling robot 失效
    用于监视晶片处理机器人的操作的方法和装置

    公开(公告)号:US06871115B2

    公开(公告)日:2005-03-22

    申请号:US10269306

    申请日:2002-10-11

    IPC分类号: B25J9/16 G06F19/00

    摘要: The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.

    摘要翻译: 用于控制晶片处理机器人的控制信号的完整性由连接到机器人控制系统的各个点的监视器监视。 监视器包括用于存储表示控制信号的正确参考特性的数据集的存储器。 监视器采样在控制系统中的各个点处控制信号,并将这些采样信号与存储的参考特性进行比较,以便确定是否存在信号差异。 如果存在差异,监视器会生成错误。

    Digital non-contact blade position detection apparatus
    2.
    发明授权
    Digital non-contact blade position detection apparatus 失效
    数字非接触刀片位置检测装置

    公开(公告)号:US06348943B1

    公开(公告)日:2002-02-19

    申请号:US09182629

    申请日:1998-10-30

    IPC分类号: H04N718

    CPC分类号: B23D59/002 G01D5/342

    摘要: A digital non-contact blade position detection apparatus is provided for use on a wafer dicing machine for blade position detection so as to correct the position of the cutting blade. The apparatus includes a light source for generating a light beam; a light converging optical unit for converting the light beam from the light source to a preset converging point; light diverting means for diverting the beam light from the light converging optical unit to a preset optical path in which the blade is interdisposed; a light diverging optical unit for diverging the diverted light beam from the light diverting means; a CCD position detector, disposed at a third predetermined distance from the light diverging optical unit, for detecting a displacament of a diffractive part of the light beam passing through the optical path between the first and second that is partly blocked out by the blade; an analog-to-digital converter for converting the analog displacement signal from the CCD position detector into digital data; and computer means for processing the digital data to thereby determine the required correction in the position of the blade due to wear to the blade. This apparatus has the benefits of performing the blade position detection in a non-contact manner, enhancing the resolving power to submicron level; allowing the detection to be unaffected by alien particles; and performing the blade position detection with quick response and high precision.

    摘要翻译: 提供了一种用于刀片位置检测的晶片切割机上的数字非接触刀片位置检测装置,以便校正切割刀片的位置。 该装置包括用于产生光束的光源; 用于将来自光源的光束转换为预设会聚点的聚光光学单元; 光转向装置,用于将来自聚光光学单元的光束转向预定的光路,其中叶片被插入其中; 光发散光学单元,用于使所述转向光束从所述光转向装置发散; CCD位置检测器,设置在距发光光学单元第三预定距离处,用于检测通过第一和第二光路之间的光束的衍射部分的位置,该光路部分被叶片阻挡; 用于将来自CCD位置检测器的模拟位移信号转换成数字数据的模拟 - 数字转换器; 以及用于处理数字数据的计算机装置,从而由​​于刀片的磨损而确定刀片位置所需的校正。 该装置具有以非接触方式执行叶片位置检测的优点,将分辨能力提高到亚微米级; 允许检测不受外来颗粒的影响; 并具有快速响应和高精度执行刀片位置检测。

    Brittle material breaking apparatus
    3.
    发明申请
    Brittle material breaking apparatus 有权
    脆性材料破碎装置

    公开(公告)号:US20050121486A1

    公开(公告)日:2005-06-09

    申请号:US10782913

    申请日:2004-02-23

    IPC分类号: B26F3/00 B26F3/02 H01L21/00

    摘要: A brittle material breaking apparatus using a lifting mechanism to lift/lower a carrier wherein the lifting mechanism is controlled to lift the carrier for holding the brittle material for breaking, and then to lower the carrier from the brittle material to a distance for enabling the brittle material to be shifted to a next scribe line for further breaking, preventing the occurrence of friction between the brittle material and the carrier and the production of static electricity and micro particles and, improving the breaking quality. The brittle material breaking apparatus further includes a stroke fine adjustment mechanism adapted to adjust the stroke of the breaking-cutter relative to the brittle material.

    摘要翻译: 一种使用提升机构来提升/降低载体的脆性材料断开装置,其中提升机构被控制以提升载体以保持用于断裂的脆性材料,然后将载体从脆性材料降低到一定距离,以使脆性 要转移到下一划线以进一步断裂的材料,防止脆性材料和载体之间的摩擦发生,并产生静电和微粒,并提高断裂质量。 脆性材料破碎装置还包括行程微调机构,该机构适于相对于脆性材料调节断刀的行程。

    Pneumatic ink-jet system
    5.
    发明授权
    Pneumatic ink-jet system 失效
    气动喷墨系统

    公开(公告)号:US07731318B2

    公开(公告)日:2010-06-08

    申请号:US12039568

    申请日:2008-02-28

    IPC分类号: B41J29/38

    CPC分类号: B41J2/175 B41J2/17596

    摘要: A pneumatic ink-jet system is applied in an inkjet printer and uses a negative pressure generator, which is designed according to the Bernoulli's Theory, with a stable airflow in a certain speed to generated stable pressure inside at least one inkpot and at least one print head. Therefore, the at least one print head is kept in an appropriate wet state and the quality of printing is enhanced. Moreover, a top surface of the ink inside the at least one inkpot can be controlled to be higher than the at least one print head, so the pneumatic ink-jet system can be applied in a large format inkjet printer.

    摘要翻译: 气动喷墨系统应用在喷墨打印机中,并使用根据伯努利理论设计的负压发生器,以一定的速度具有稳定的气流,以在至少一个墨水罐内产生稳定的压力,并且至少一个打印 头。 因此,至少一个打印头保持在适当的湿润状态,并提高打印质量。 此外,可以将至少一个墨水罐内的墨水的顶面控制为高于至少一个打印头,因此气动喷墨系统可以应用于大型喷墨打印机。

    Cutting tool angle adjustment method
    7.
    发明申请
    Cutting tool angle adjustment method 有权
    切削刀具角度调整方法

    公开(公告)号:US20060036337A1

    公开(公告)日:2006-02-16

    申请号:US11010336

    申请日:2004-12-14

    IPC分类号: G05B19/18 G05B11/32 G06F19/00

    摘要: A cutting tool adjustment method is disclosed to lower a cutting tool on a transparent Mylar to produce an indentation before actual scribing operation, and then to pick up the image of the indentation, and then to use a numerical analysis method and the set formula to automatically calculate the correction angle and position and to adjust the angle and position of the cutting tool subject to the calculation result, and then to repeat the calculation and adjustment procedure if necessary. Thus, the cutting tool and its cutting edge can be accurately adjusted to the correct angle and position to obtain a precise indentation. Further, by means of the automatic adjustment procedure, the present invention saves much adjusting time, thereby improving the productivity.

    摘要翻译: 公开了一种切割工具调整方法,以降低透明聚酯薄膜上的切割工具,以在实际划线操作之前产生凹痕,然后拾取凹痕的图像,然后使用数字分析方法和设定公式自动 计算校正角度和位置,并根据计算结果调整切削刀具的角度和位置,然后根据需要重复计算和调整步骤。 因此,可以将切削刀具及其切削刃精确地调节到正确的角度和位置,以获得精确的压痕。 此外,通过自动调整程序,本发明节省了大量的调整时间,从而提高了生产率。