Ink jet head including a metal chamber layer and a method of fabricating the same
    2.
    发明授权
    Ink jet head including a metal chamber layer and a method of fabricating the same 失效
    包括金属室层的喷墨头及其制造方法

    公开(公告)号:US07465403B2

    公开(公告)日:2008-12-16

    申请号:US11063993

    申请日:2005-02-24

    IPC分类号: G01D15/00 G11B5/127

    摘要: A method of fabricating an ink jet head having a metal chamber layer includes preparing a substrate having pressure-generating elements to generate pressure to eject ink ejection. The metal chamber layer to define sidewalls of an ink flow path is then formed on the substrate. A sacrificial layer is formed to fill a region where the ink flow path is to be formed between the sidewalls defined by the metal chamber layer. A nozzle layer having nozzles corresponding to the pressure-generating elements is formed on the metal chamber layer and the sacrificial layer.

    摘要翻译: 制造具有金属室层的喷墨头的方法包括制备具有压力产生元件的基板以产生喷射喷墨的压力。 然后在衬底上形成用于限定墨水流路的侧壁的金属室层。 形成牺牲层以填充在由金属室层限定的侧壁之间形成油墨流动路径的区域。 在金属室层和牺牲层上形成具有对应于压力产生元件的喷嘴的喷嘴层。

    Inkjet printer head and method of fabricating the same
    3.
    发明申请
    Inkjet printer head and method of fabricating the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号:US20060044362A1

    公开(公告)日:2006-03-02

    申请号:US11059501

    申请日:2005-02-17

    IPC分类号: B41J2/05

    摘要: An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.

    摘要翻译: 喷墨打印机头及其制造方法包括:基板,其具有形成在基板的底面的供墨孔,形成在基板的顶面的下室,以及限流器, 供给孔和下室,形成在基板上的氧化物层,形成在氧化物层上并且平行于基板的表面设置以跨越下部室的加热器,与该加热器电连接的引线以及设置在喷嘴层 在加热器上配置墨水通道与下部腔室并且在喷嘴层的上部具有喷嘴。 喷墨打印头能够通过使用加热器的两个表面加热墨水来提高热效率,因为加热器设置在墨水室的中心,并且通过使电流密度和电流流动均匀地提高加热器的特性 由于加热器形成为直线而没有任何弯曲或弯曲部分。

    Inkjet printhead and method of manufacturing the same
    4.
    发明申请
    Inkjet printhead and method of manufacturing the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号:US20060284938A1

    公开(公告)日:2006-12-21

    申请号:US11415143

    申请日:2006-05-02

    IPC分类号: B41J2/045

    摘要: An Inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate having an ink feedhole, a chamber layer formed on the substrate to define an ink chamber filled with ink supplied though the ink feedhole, and a nozzle layer formed on the chamber layer and having one or more nozzles to eject the ink filled in the chamber, wherein the chamber layer and the nozzle layer are made of solid film resists.

    摘要翻译: 喷墨打印头及其制造方法。 喷墨打印头包括具有供墨孔的基板,形成在基板上以限定填充有通过供墨孔供应的墨水的墨室的腔室层,以及形成在腔室层上并具有一个或多个喷嘴以喷射的喷嘴层 填充在室中的油墨,其中室层和喷嘴层由固体膜抗蚀剂制成。

    Inkjet printer head and method of fabricating the same
    6.
    发明申请
    Inkjet printer head and method of fabricating the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号:US20060044347A1

    公开(公告)日:2006-03-02

    申请号:US11071363

    申请日:2005-03-04

    IPC分类号: B41J2/135

    摘要: An inkjet printer head includes a substrate having an ink-feed hole to supply ink stored in a cartridge to an ink chamber and a restrictor in fluid communication with the ink chamber, an oxide layer formed on the substrate, a heater disposed on the oxide layer above the restrictor and having fixed parts disposed on the oxide layer, slopes extending upward and away from the restrictor at an incline, and a parallel part extending between the slopes parallel to the substrate, a lead formed to be in electrical contact with the heater, a chamber layer formed to cover the lead and to define the ink chamber, and a nozzle layer formed on the chamber layer and having a nozzle. In the inkjet printer head, the lifespan of the heater may be extended since the heater is supported by the slopes, which function as a shock absorbing member when ink supply pressure or cavitation force is applied to a surface of the heater. In addition, since the heater does not have a right angle structure, the heater may be formed to have a uniform thickness even when a thin layer used for the heater is formed by a deposition method.

    摘要翻译: 一种喷墨打印头包括:具有供墨孔的基板,用于将存储在墨盒中的墨水供应到墨室;以及限制器,其与所述墨室流体连通;形成在所述基板上的氧化物层;设置在所述氧化物层上的加热器 在限流器上方并且具有设置在氧化物层上的固定部分,倾斜在倾斜处向上延伸并远离限制器,并且平行部分在平行于衬底的斜面之间延伸,形成为与加热器电接触的引线, 形成为覆盖引线并限定墨水室的室层,以及形成在室层上并具有喷嘴的喷嘴层。 在喷墨打印机头中,加热器的寿命可以延长,因为加热器由斜面支撑,当墨水供应压力或空穴力施加到加热器的表面时,该斜面用作减震构件。 此外,由于加热器不具有直角结构,即使当通过沉积方法形成用于加热器的薄层时,也可以将加热器形成为具有均匀的厚度。

    Inkjet printer head and method of manufacturing the same
    7.
    发明申请
    Inkjet printer head and method of manufacturing the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号:US20060061629A1

    公开(公告)日:2006-03-23

    申请号:US11071350

    申请日:2005-03-04

    IPC分类号: B41J2/05

    摘要: An inkjet printer head includes a substrate having a manifold and an ink channel to supply ink, a nozzle plate formed on the substrate, a chamber formed between the substrate and the nozzle plate and extending toward the substrate and the nozzle plate, an electrode formed at an interface between the substrate and the nozzle plate and around the chamber, and a heater having both ends extending in contact with the electrode to be suspended on the chamber in direct contact with the ink and to generate bubbles from both surfaces thereof. The inkjet printer head is capable of improving manufacturing process efficiency by omitting a process of separately forming a heater passivation layer, operating the heater at low electric power by omitting the heater passivation layer, improving integrity of a nozzle by lowering a working voltage, and improving reliability in manufacturing processes by locating the suspended heater to be in parallel with the substrate and the electrode.

    摘要翻译: 喷墨打印头包括具有歧管和用于供应墨水的墨水通道的基板,形成在基板上的喷嘴板,形成在基板和喷嘴板之间并且朝向基板和喷嘴板延伸的腔室,形成在 衬底和喷嘴板之间以及围绕室的界面,以及加热器,其两端延伸成与电极接触,以悬浮在与油墨直接接触的室上并从其两个表面产生气泡。 喷墨打印头能够通过省略分开形成加热器钝化层的过程来提高制造工艺效率,通过省略加热器钝化层以低功率操作加热器,通过降低工作电压来改善喷嘴的完整性,并且改进 通过将悬挂的加热器定位成与基底和电极平行的方式制造过程中的可靠性。

    Ink jet head including a metal chamber layer and a method of fabricating the same
    8.
    发明申请
    Ink jet head including a metal chamber layer and a method of fabricating the same 失效
    包括金属室层的喷墨头及其制造方法

    公开(公告)号:US20060037936A1

    公开(公告)日:2006-02-23

    申请号:US11063993

    申请日:2005-02-24

    IPC分类号: G01D15/00

    摘要: A method of fabricating an ink jet head having a metal chamber layer includes preparing a substrate having pressure-generating elements to generate pressure to eject ink ejection. The metal chamber layer to define sidewalls of an ink flow path is then formed on the substrate. A sacrificial layer is formed to fill a region where the ink flow path is to be formed between the sidewalls defined by the metal chamber layer. A nozzle layer having nozzles corresponding to the pressure-generating elements is formed on the metal chamber layer and the sacrificial layer.

    摘要翻译: 制造具有金属室层的喷墨头的方法包括制备具有压力产生元件的基板以产生喷射喷墨的压力。 然后在衬底上形成用于限定墨水流路的侧壁的金属室层。 形成牺牲层以填充在由金属室层限定的侧壁之间形成油墨流动路径的区域。 在金属室层和牺牲层上形成具有对应于压力产生元件的喷嘴的喷嘴层。

    METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD
    10.
    发明申请
    METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD 审中-公开
    制造热喷头的方法

    公开(公告)号:US20080283494A1

    公开(公告)日:2008-11-20

    申请号:US11874551

    申请日:2007-10-18

    IPC分类号: G11B5/127

    摘要: A method of manufacturing a thermal inkjet printhead. The method includes forming on a substrate a chamber layer having an ink chamber, forming a sacrificial layer on the chamber layer wherein the sacrificial layer fills the ink chamber, and planarizing a top surface of the sacrificial layer and of the chamber layer using a primary Chemical Mechanical Polishing (CMP) process until the sacrificial layer and the chamber layer attain a desired height, wherein a slurry is used in the primary CMP process that includes polishing particles having an average particle size of 500 nm˜2 μm.

    摘要翻译: 一种制造热喷墨打印头的方法。 该方法包括在基底上形成具有墨水室的腔室层,在腔室层上形成牺牲层,其中牺牲层填充墨水腔,以及使用主要化学物质对牺牲层和腔室层的顶表面进行平坦化 机械抛光(CMP)工艺直到牺牲层和室层达到期望的高度,其中在包括平均粒度为500nm〜2μm的抛光颗粒的初级CMP工艺中使用浆料。