公开(公告)号：US20070065678A1

公开(公告)日：2007-03-22

申请号：US10575031

申请日：2004-10-06

申请人： Kyung-hyun Ko ,  Ha-yong Lee ,  Jae-hong Lee ,  Hung-sang Lee ,  Jae-jung Lee

发明人： Kyung-hyun Ko ,  Ha-yong Lee ,  Jae-hong Lee ,  Hung-sang Lee ,  Jae-jung Lee

IPC分类号： B32B9/00 ,  B32B19/00 ,  H05H1/24 ,  B05D1/12 ,  B05D3/02

CPC分类号： H01L21/6833 ,  C23C16/4586 ,  C23C24/04

摘要： The present invention relates to an electro-static chuck with non-sintered AlN and a method of preparing the same. Especially, the present invention relates to the electro-static chuck with non-sintered AlN which having coated aluminum nitride (AlN) layer as a dielectric one on the purpose of chucking the wafers in the process of wafers and a method of preparing the same. The electro-static chuck of the present invention has excellent dielectric characteristics, bonding strength and thermal conductivity by forming an AlN layer as a dielectric one without sintering process or bonding process with binders.

摘要翻译： 本发明涉及具有非烧结AlN的静电卡盘及其制备方法。 特别地，本发明涉及具有非烧结AlN的静电卡盘及其制备方法，该非磁性卡盘具有涂覆的氮化铝（AlN）层作为电介质，具有夹持晶片的晶片的目的。 本发明的静电卡盘通过不用烧结工艺或粘合剂进行烧结工艺或粘接工艺，通过形成作为电介质的AlN层，具有优异的介电特性，结合强度和导热性。

公开(公告)号：US20080220234A1

公开(公告)日：2008-09-11

申请号：US11911416

申请日：2006-04-05

申请人： Kyung-hyun Ko ,  Ha-yong Lee ,  Jac-hong Lee ,  Jae-jung Lee ,  Young-ho Yu

发明人： Kyung-hyun Ko ,  Ha-yong Lee ,  Jac-hong Lee ,  Jae-jung Lee ,  Young-ho Yu

IPC分类号： B32B5/16 ,  C23C26/00 ,  B05D1/12 ,  B32B18/00 ,  B32B15/02 ,  B05D3/02

CPC分类号： C23C24/04 ,  B05B7/205 ,  B05B15/18 ,  Y10T428/252

摘要： The invention provides a method of preparing a wear-resistant coating layer comprising metal matrix composite and a coating layer prepared by using the same and more particularly, it provides a method of preparing a wear-resistant coating layer comprising metal matrix composite, which comprises the steps of providing a base material, preparing a mixture powder comprising a metal, alloy or mixture particle thereof having an average diameter of 50 to 100 um and a ceramic or mixture particle thereof having an average diameter of 25 to 50 um in a ratio of 1:1 to 3:1 by volume, injecting the mixture powder into a spray nozzle for coating, and coating the mixture powder on the surface of the base material by accelerating the mixture powder in the state of non-fusion at a rate of 300 to 1,200 m/s by the flow of transportation gas flowing in the nozzle and a coating layer prepared by using the same whereby the coating layer with high wear resistance and excellent resistance against fatigue crack on the surface of the base material without causing damages such as heat strain to the base material during the formation of the coating layer can be provided.

摘要翻译： 本发明提供一种制备包含金属基复合材料和通过使用该金属基复合材料制备的涂层的耐磨涂层的方法，更具体地，其提供了制备包含金属基复合材料的耐磨涂层的方法，该方法包括 提供基材的步骤，制备包含平均直径为50-100μm的金属，合金或其混合物颗粒的混合物粉末和平均直径为25-50μm的陶瓷或其混合物颗粒，其比例为1 ：1〜3:1（体积），将混合粉末注入用于涂布的喷嘴中，并通过以300℃的速度将混合粉末以不熔化的状态加速而将混合粉末涂覆在基材的表面上 在喷嘴中流动的输送气体的流量为12​​00m / s，通过使用该涂层制备的涂层，由此具有高耐磨性和优异的耐疲劳性的涂层 可以提供在基材的表面上的ck，而不会在形成涂层期间引起诸如对基材的热应变的损坏。