公开(公告)号：US20240181485A1

公开(公告)日：2024-06-06

申请号：US18438108

申请日：2024-02-09

Applicant: LAPLACE (WUXI) SEMICONDUCTOR TECHNOLOGY CO., LTD.

Inventor： Jia DAI ,  Henan ZHU ,  Xuedi DONG ,  Wu ZHANG ,  Jiaji LIN

IPC: B05B15/656 ,  B05B1/24 ,  B05B1/32 ,  B05B15/70 ,  B05B17/04

CPC classification number: B05B15/656 ,  B05B1/24 ,  B05B1/32 ,  B05B15/70 ,  B05B17/04

Abstract: Disclosed is a vacuum coating device, including a heating apparatus, a loading plate apparatus, a spraying apparatus, a processing chamber and a plurality of valve chambers. The heating apparatus is configured to heat the processing chamber to a temperature that reaches a reaction temperature of the object to be coated and the processing gas, the loading plate apparatus is configured to load the object to be coated, the processing chamber includes a first coating vacuum chamber, a second coating vacuum chamber and a loading plate conversion vacuum chamber, and the loading plate conversion vacuum chamber is configured to convert a coating surface of an object to be coated to achieve a function of coating both sides of the object to be coated on a closed production line, and to improve production quality of the object to be coated.