公开(公告)号：US20230329076A1

公开(公告)日：2023-10-12

申请号：US18023590

申请日：2021-11-17

Applicant: LG CHEM, LTD.

Inventor： Kwang Jin JEONG ,  Heeyoung SHIN ,  Jae Il KIM ,  Jun Young LEE

IPC: H10K71/00 ,  H10K71/16 ,  H10K71/70

CPC classification number: H10K71/164 ,  H10K71/70 ,  H10K71/811

Abstract: Provided is a deposition apparatus for an organic light emitting diode, in which maint operations with deposition material are carried out independently by including an auxiliary chamber, thereby shortening the evaluation time of a deposition material.