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公开(公告)号:US20250169149A1
公开(公告)日:2025-05-22
申请号:US18790075
申请日:2024-07-31
Applicant: LG Display Co., Ltd.
Inventor: HyeJi JEON , Soyang CHOI , Yubeen LIM , Youngjin YI
IPC: H01L29/423 , H01L29/417 , H01L29/66 , H01L29/786 , H10K59/121
Abstract: A thin film transistor includes a buffer layer on a base substrate and having a trench; an active layer on the buffer layer; and a gate electrode overlapping the active layer. The active layer includes a channel area, a source area, and a drain area. The trench includes a first trench having the source area therein, and a second trench having the drain area therein. The channel area includes a first channel area, a second channel area on one side of the first channel area and in the first trench, and a third channel area on the other side of the first channel area and in the second trench. A distance between the upper surface of the base substrate and the second channel area is shorter than a shortest distance between the upper surface of the base substrate and the first channel area.