MEMs Amplitude Modulator and MEMs Magnetic Field Sensor Including Same
    1.
    发明申请
    MEMs Amplitude Modulator and MEMs Magnetic Field Sensor Including Same 有权
    MEMs幅度调制器和MEM磁场传感器包括相同

    公开(公告)号:US20160211803A1

    公开(公告)日:2016-07-21

    申请号:US14913537

    申请日:2014-08-05

    Abstract: The present invention provides an amplitude modulator, which is disposed in an area through which a magnetic field flows so as to modulate amplitudes, comprising: a substrate; a first driving electrode which receives a first frequency signal and a second frequency signal supplied from the substrate and carries out resonant motion by the magnetic field; and a second driving electrode for receiving the second frequency signal and carries out resonant motion by the first driving electrode and the magnetic field, wherein a modulated signal is generated by modulating the amplitudes of the first and second frequency signals through the resonant motions of the first and second driving electrodes. Therefore, since the signal generated by modulating a carrier signal through mechanical resonance according to the magnetic field is outputted, amplitude modulation can be carried out without a complicated circuit configuration. In addition, since an MEMS device is a single structure that does not include an insulating layer, a single signal is applied to one structure, thereby simplifying driving, and all the driving electrodes of both ends thereof are driven so as to double a change in variable capacitance, thereby improving sensing ability.

    Abstract translation: 本发明提供了一种幅度调制器,其设置在磁场流过的区域中以调制幅度,包括:基板; 第一驱动电极,其接收从所述基板供给的第一频率信号和第二频率信号,并通过所述磁场进行共振运动; 以及第二驱动电极,用于接收第二频率信号并通过第一驱动电极和磁场进行谐振运动,其中通过第一和第二频率信号的谐振运动调制第一和第二频率信号的振幅来产生调制信号 和第二驱动电极。 因此,由于通过根据磁场的机械谐振调制载波信号而产生的信号被输出,所以可以在没有复杂的电路结构的情况下进行幅度调制。 此外,由于MEMS器件是不包括绝缘层的单一结构,因此将单个信号施加到一个结构,从而简化驱动,并且驱动其两端的所有驱动电极以使两个变化倍增 可变电容,从而提高感测能力。

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