公开(公告)号：US12000908B2

公开(公告)日：2024-06-04

申请号：US17419209

申请日：2019-12-27

Applicant: Clean Energy Labs, LLC

Inventor： Alexander Joseph Pinkerton ,  Joseph F. Pinkerton

IPC: G01R33/02 ,  B81C1/00 ,  G01R33/028

CPC classification number: G01R33/0286 ,  B81C1/00158 ,  B81B2203/0127 ,  B81B2203/0315

Abstract: Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. The NEMS devices have a serpentine shape arrangement of the electrically conductive membrane. The electrically conductive membrane can be controllably wicked down on the edge of the oxide cavity to increase sensitivity of the NEMS device.

公开(公告)号：US10031191B1

公开(公告)日：2018-07-24

申请号：US14997423

申请日：2016-01-15

Applicant: HRL Laboratories, LLC

Inventor： Hung Nguyen ,  Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Joshua A. Erbland

IPC: G01R33/028

CPC classification number: G01R33/0286 ,  G01R33/0283

Abstract: A magnetometer comprising a resonating structure which is naturally resonant in at least three resonant modes, a resonant frequency of the three modes being sufficiently separated to allow of detection of same, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of the loop.

公开(公告)号：US09664749B2

公开(公告)日：2017-05-30

申请号：US14662786

申请日：2015-03-19

Applicant: SAGATEK CO., LTD.

Inventor： Kuei-Ann Wen ,  Chia-Feng Chang

IPC: G01R33/02 ,  G01R33/028 ,  G01R33/038

CPC classification number: G01R33/028 ,  G01R33/0286 ,  G01R33/038

Abstract: Disclosed is a resonant magnetic field sensor, comprising a detector structure including a mass block and displacement detection electrodes; capacitance to voltage converter and amplifier to convert detection signals of the detection electrodes into voltage signals, as output signals of the magnetic field sensor; and a vibration driving circuit to provide the output signals to the mass block in the form of a current, to drive the mass block to vibrate. The vibration driving circuit may be a comparator.

公开(公告)号：US09535137B2

公开(公告)日：2017-01-03

申请号：US14466488

申请日：2014-08-22

Applicant: ams International AG

Inventor： Jozef van Beek ,  Casper van der Avoort

IPC: G01R33/028 ,  G01C17/28 ,  G01R33/038

CPC classification number: G01R33/0286 ,  G01C17/28 ,  G01R33/0283 ,  G01R33/038

Abstract: Various exemplary embodiments relate to a magnetometer device to measure oscillation frequency, including a feedthrough loop including an amplifier and a voltage bias connected to a first input of a metallic membrane; a membrane ground connected to a membrane output; a fixed plate including a first fixed plate output connected to a second input of the amplifier, wherein the fixed plate is physically separated from the metallic membrane but connected to the metallic membrane by a Lorentz force, and where the physical separation differs due to an angle of a magnetic field relative to a direction of a current; a second fixed plate output sensitive to the Lorentz force; and a circuit connected to the second fixed plate output to calculate an angle of the magnetic force based upon the Lorentz force.

Abstract translation: 各种示例性实施例涉及测量振荡频率的磁力计装置，包括包括放大器的馈通回路和连接到金属膜的第一输入端的电压偏置; 连接到膜输出的膜接地; 固定板，包括连接到放大器的第二输入的第一固定板输出，其中固定板在物理上与金属膜分离，但是通过洛伦兹力连接到金属膜，并且其中物理分离由于角度而不同 相对于电流方向的磁场; 对洛伦兹力敏感的第二固定板输出; 以及连接到第二固定板输出的电路，以计算基于洛伦兹力的磁力角度。

公开(公告)号：US20160077166A1

公开(公告)日：2016-03-17

申请号：US14485248

申请日：2014-09-12

Applicant: InvenSense, Incorporated

Inventor： Alexey Morozov ,  Shang-Hung Lin ,  Sinan Karahan

IPC: G01R33/028 ,  G01P15/00 ,  G01C19/00

CPC classification number: G01R33/0286 ,  G01C19/00 ,  G01P15/00 ,  G06F3/012 ,  G06F3/0346 ,  G06F3/038

Abstract: Systems and methods are disclosed for predicting a future orientation of a device. A future motion sensor sample may be predicted using a plurality of motion sensor samples for the device up to a current time. After determining the current orientation of the device, the predicted motion sensor sample may be used to predict a future orientation of the device at one or more times.

Abstract translation: 公开了用于预测设备的未来定向的系统和方法。 可以使用用于该设备的多个运动传感器样本直到当前时间来预测将来的运动传感器样本。 在确定设备的当前方向之后，可以使用预测的运动传感器样本来一次或多次地预测设备的未来定向。

公开(公告)号：US09222867B2

公开(公告)日：2015-12-29

申请号：US13476989

申请日：2012-05-21

Applicant: Brian L. Norling ,  John C. G. Dunfield

Inventor： Brian L. Norling ,  John C. G. Dunfield

IPC: G01R33/00 ,  G01R33/34 ,  G01N5/02 ,  G01R33/028 ,  G01N1/40 ,  G01R33/12 ,  G01N1/22

CPC classification number: G01N5/02 ,  G01N1/405 ,  G01N2001/2223 ,  G01R33/0286 ,  G01R33/1261

Abstract: A sensor system is formed from a micro machined resonant structure with multiple resonant elements, a tracking resonator control electronics, and signal processing algorithms. The moving elements of the resonator are coated with chemically active materials that change mass when exposed to the target chemical resulting in a change in frequency or period of oscillation. The changes in frequency or period are processed by multi-sensor chemical detection algorithms to identify chemical types and concentrations. In essence, the resonator and drive electronics form a closed loop oscillator operating at the resonator's natural frequency. The resonators are formed from silicon using photolithographic processes. The resonator design includes in-plane resonant motion combined with dynamic balance to operate with a high Q even in the presence of atmospheric pressure.

Abstract translation: 传感器系统由具有多个谐振元件的微加工谐振结构，跟踪谐振器控制电子器件和信号处理算法形成。 谐振器的移动元件涂覆有化学活性材料，其在暴露于目标化学物质时改变质量，导致振荡频率或振荡周期的变化。 频率或周期的变化由多传感器化学检测算法处理，以识别化学类型和浓度。 实质上，谐振器和驱动电子器件形成以谐振器的固有频率工作的闭环振荡器。 谐振器由使用光刻工艺的硅形成。 谐振器设计包括平面内谐振运动与动平衡结合，即使在大气压力存在的情况下也能以高Q运行。

公开(公告)号：US20150331066A1

公开(公告)日：2015-11-19

申请号：US14713605

申请日：2015-05-15

Applicant: ROHM CO., LTD.

Inventor： Goro NAKATANI ,  Yoshihiro TADA

IPC: G01R33/07 ,  G01R33/00

CPC classification number: G01R33/0286 ,  G01R33/0052 ,  G01R33/07

Abstract: A MEMS sensor according to the present invention includes a base substrate including a displaceably supported movable portion and a lid substrate covering the movable portion and functioning as a magnetic sensor that detects magnetism by making use of the Hall effect.

Abstract translation: 根据本发明的MEMS传感器包括基底基板，其包括可移动支撑的可动部分和覆盖可动部分的盖基板，并且用作通过利用霍尔效应来检测磁性的磁传感器。

公开(公告)号：US08860409B2

公开(公告)日：2014-10-14

申请号：US13004365

申请日：2011-01-11

Applicant: Joseph Seeger ,  Chiung C. Lo ,  Baris Cagdaser ,  Derek Shaeffer

Inventor： Joseph Seeger ,  Chiung C. Lo ,  Baris Cagdaser ,  Derek Shaeffer

IPC: G01R33/02 ,  G01R33/028 ,  G01R33/038

CPC classification number: G01R33/038 ,  G01R33/0286

Abstract: A micromachined magnetic field sensor is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem includes a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.

Abstract translation: 公开了一种微加工磁场传感器。 微加工磁场包括基片; 驱动子系统，所述驱动子系统包括多个梁，以及连接到所述基板的至少一个锚固件; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场沿第二轴作用在驱动子系统上的洛伦兹力。 微加工磁场传感器还包括感测子系统，感测子系统包括多个光束，以及至少一个连接到衬底的锚; 其中所述感测子系统的一部分沿着第四轴线移动; 驱动子系统和感测子系统之间的耦合弹簧，其引起感测子系统响应于磁场的运动; 以及用于检测感测子系统的运动的位置传感器。

公开(公告)号：US08860403B2

公开(公告)日：2014-10-14

申请号：US12710675

申请日：2010-02-23

Applicant: Arnaud Walther ,  Robert Cuchet ,  Jerome Delamare ,  Aline Msaed ,  Jean-Baptiste Albertini

Inventor： Arnaud Walther ,  Robert Cuchet ,  Jerome Delamare ,  Aline Msaed ,  Jean-Baptiste Albertini

IPC: G01B7/14 ,  G01R33/022 ,  G01R33/028

CPC classification number: G01R33/022 ,  G01R33/028 ,  G01R33/0286

Abstract: A gradient sensor of a component of a magnetic field comprising at least one elementary sensor comprising a deformable mass (31) equipped with a permanent magnet (32) having a magnetization direction substantially colinear to the direction of the gradient of the component of the magnetic field to be acquired by the sensor. The deformable mass (31) is able to deform under the effect of a force exerted on the magnet by the gradient, the effect of this force being to shift it, by dragging the deformable mass (31), in a direction substantially colinear to the component of the magnetic field for which the sensor has to acquire the gradient. The deformable mass (31) is anchored to a fixed support device (33) in at least two anchoring points (36) substantially opposite relative to the mass (31). The elementary sensor also comprises measuring means (35, 35.1, 35.2, 35.3) of at least one electric variable translating deformation or stress of the deformable mass (31) engendered by the gradient.

Abstract translation: 磁场分量的梯度传感器包括至少一个元件传感器，该至少一个元件传感器包括具有永磁体（32）的可变形质量块（31），该永磁体具有与磁场分量梯度方向大致共线的磁化方向 由传感器采集。 可变形质量块（31）能够在施加在磁体上的力的作用下通过梯度变形，该力的作用是通过将可变形的质量块（31）沿基本上共线的方向 传感器必须获取梯度的磁场分量。 可变形质量块（31）在至少两个相对于质量块（31）相对的固定点（36）中锚固到固定支撑装置（33）。 基本传感器还包括至少一个电可变的测量装置（35,35.1,35.2,35.3），该电可变平移由该梯度产生的可变形质量块（31）的变形或应力。

公开(公告)号：US20140292323A1

公开(公告)日：2014-10-02

申请号：US14228090

申请日：2014-03-27

Applicant: King Abdulaziz City for Science and Technology ,  IMEC

Inventor： Mahmoud A. Farghaly ,  Veronique Rochus ,  Xavier Rottenberg ,  Hendrikus Tilmans

IPC: G01R33/028 ,  G06F17/50

CPC classification number: G01R33/0286 ,  G01R15/245 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/0283 ,  G01V3/087 ,  G01V3/40 ,  G06F17/5086

Abstract: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the centre of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

Abstract translation: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架，其中框架的相对的内壁与仅两个扭转弹簧的一端接触，每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中，磁力计使用差分电容测量来测量两个正交感测模式中的磁场。