公开(公告)号：US20030123607A1

公开(公告)日：2003-07-03

申请号：US10309279

申请日：2002-12-04

Applicant: LG.PHILIPS LCD CO., LTD.

Inventor： Binn Kim ,  Hyun Ja Kwon ,  Kyu Ho Park

IPC: G01T001/36

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: A method for making a quantitative analysis of nickel that includes the steps of providing an amorphous silicon layer, forming an insulating film on the amorphous silicon layer, depositing nickel on the insulating film, etching a defined portion of the nickel with an etchant to create a specimen, drying the specimen on an AP1 film and subjecting the dried specimen to energy dispersive X-ray fluorescence analysis.

Abstract translation: 一种镍的定量分析方法，包括提供非晶硅层，在非晶硅层上形成绝缘膜的步骤，在绝缘膜上沉积镍，用蚀刻剂蚀刻镍的限定部分以产生 样品，在AP1膜上干燥样品，并对干燥的样品进行能量色散X射线荧光分析。