公开(公告)号：US20190187003A1

公开(公告)日：2019-06-20

申请号：US15842763

申请日：2017-12-14

Applicant: Lam Research Corporation

Inventor： Justin Brunnett ,  Shawn Tokairin ,  Shijian Li ,  Darrell Ehrlich

IPC: G01K1/10 ,  H01J37/32

CPC classification number: G01K1/10 ,  G01K7/02 ,  G01K7/22 ,  G01K11/20 ,  H01J37/32477 ,  H01J37/32935

Abstract: A temperature sensor probe having a shaft is described. The shaft is made from a material that is corrosion resistant to plasma and remnants of a plasma process. The shaft extends over a portion of a metal layer, which forms a tip of the temperature sensor probe. The shaft further extends over a sleeve of the temperature sensor probe, a portion of a fiber optic medium of the temperature sensor probe and a portion of the fiber bundle housing of the temperature sensor probe. The material of the shaft increases a number of active processing hours for which the shaft is used within a plasma chamber during the plasma process.