公开(公告)号：US20220013388A1

公开(公告)日：2022-01-13

申请号：US17299291

申请日：2018-12-03

Applicant: Lam Research Corporation

Inventor： John E. Daugherty ,  Changyou Jing ,  Sushil Anand

IPC: H01L21/67 ,  H01L21/687

Abstract: Various embodiments include apparatuses to provides an in-situ, non-intrusive verification of substrate pin-lifters while a substrate is in a substrate-processing location on a process tool. The disclosed subject matter can also verify any unexpected substrate movement prior to or while the substrate is being removed from the process tool. In an exemplary embodiment, a pin-lifter test substrate includes a number of motion sensors and at least one force sensor. The motion sensors including at least one type of sensor selected from sensor types including inclinometers and accelerometers. A memory device on the pin-lifter test substrate records data received from the motion sensors. Instead of or in addition to the memory device, a wireless communications device transmits data received from the motion sensors to a remote receiver. Other apparatuses and systems are disclosed.