公开(公告)号：US20070045572A1

公开(公告)日：2007-03-01

申请号：US11214055

申请日：2005-08-30

申请人： Lambertus Kessels ,  Patricius Tinnemans ,  Remco Van Engelen

发明人： Lambertus Kessels ,  Patricius Tinnemans ,  Remco Van Engelen

IPC分类号： G21K5/10

CPC分类号： G03F7/70291 ,  G03F7/70508

摘要： A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompress the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompress at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompress at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.

摘要翻译： 光刻设备包括调制辐射束的单独可控元件的阵列，压缩图案存储器，其通过调制束存储要在衬底上形成的所请求的剂量图案的压缩表示;以及字典解压缩器，至少 部分解压缩压缩表示。 字典解压缩器包括外部字典存储器，第一字典解码器，其通过从外部字典存储器提取与包含在外部字典存储器中的外部字典存储器的引用相对应的模式数据的至少部分来解压缩压缩表示的至少一部分 压缩表示和具有内部字典存储器的第二字典解码器，所述第二字典解码器通过从内部字典存储器提取对应于对内部的引用的图案数据的部分来至少部分地解压缩压缩表示的至少一部分 包含在压缩表示中的字典存储器。