公开(公告)号：US4806774A

公开(公告)日：1989-02-21

申请号：US60090

申请日：1987-06-08

申请人： Lawrence H. Lin ,  Daniel L. Cavan ,  Robert B. Howe

发明人： Lawrence H. Lin ,  Daniel L. Cavan ,  Robert B. Howe

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/956 ,  H01L21/66 ,  G02B27/42

CPC分类号： G01N21/95623

摘要： An inspection system (10, 100) employs a Fourier transform lens (34, 120) and an inverse Fourier transform lens (54, 142) positioned along an optic axis (48, 144) to produce from an illuminated area of a patterned specimen wafer (12) a spatial frequency spectrum whose frequency components can be selectively filtered to produce an image pattern of defects in the illuminated area of the wafer. Depending on the optical component configuration of the inspection system, the filtering can be accomplished by a spatial filter of either the transmissive (50) or reflective (102) type. The lenses collect light diffracted by a wafer die (14) aligned with the optic axis and light diffracted by other wafer dies proximately located to such die. The inspection system is useful for inspecting only dies having many redundant circuit patterns. The filtered image strikes the surface of a two-dimensional photodetector array (58) which detects the presence of light corresponding to defects in only the illuminated on-axis wafer die. Inspection of all possible defects in the portions of the wafer surface having many redundant circuit patterns is accomplished by mounting the wafer onto a two-dimensional translation stage and moving the stage (40) so that the illuminated area continuously scans across the wafer surface from die to die until the desired portions of the wafer surface have been illuminated. The use of a time delay integration technique permits continuous stage movement and inspection of the wafer surface in a raster scan fashion.

公开(公告)号：USRE33956E

公开(公告)日：1992-06-09

申请号：US613208

申请日：1990-11-14

申请人： Lawrence H. Lin ,  Daniel L. Cavan ,  Robert B. Howe

发明人： Lawrence H. Lin ,  Daniel L. Cavan ,  Robert B. Howe

IPC分类号： G01N21/956

CPC分类号： G01N21/95623

摘要： An inspection system (10, 100) employs a Fourier transform lens (34, 120) and an inverse Fourier transform lens (54, 142) positioned along an optic axis (48, 144) to produce from an illuminated area of a patterned specimen wafer (12) a spatial frequency spectrum whose frequency components can be selectively filtered to produce an image pattern of defects in the illuminated area of the wafer. Depending on the optical component configuration of the inspection system, the filtering can be accomplished by a spatial filter of either the transmissive (50) or reflective (102) type. The lenses collect light diffracted by a wafer die (14) aligned with the optic axis and light diffracted by other wafer dies proximately located to such die. The inspection system is useful for inspecting only dies having many redundant circuit patterns. The filtered image strikes the surface of a two-dimensional photodetector array (58) which detects the presence of light corresponding to defects in only the illuminated on-axis wafer die. Inspection of all possible defects in the portions of the wafer surface having many redundant circuit patterns is accomplished by mounting the wafer onto a two-dimensional translation stage and moving the stage (40) so that the illuminated area continuously scans across the wafer surface from die to die until the desired portions of the wafer surface have been illuminated. The use of a time delay integration technique permits continuous stage movement and inspection of the wafer surface in a raster scan fashion.

公开(公告)号：US5172000A

公开(公告)日：1992-12-15

申请号：US608208

申请日：1990-11-02

申请人： Victor A. Scheff ,  Lawrence H. Lin ,  Robert B. Howe

发明人： Victor A. Scheff ,  Lawrence H. Lin ,  Robert B. Howe

IPC分类号： G01N21/956 ,  G02B27/46

CPC分类号： G01N21/95623 ,  G02B27/46

摘要： In an imaging system (10) for detecting defects in a specimen (14) having a repetitive pattern (16), a spatial filter (50) receives a spatial frequency spectrum produced by a Fourier transform lens (34) and blocks preselected spatial frequency components thereof. The spatial filter includes an array of substantially parallel opaque stripes (70a-70c) that are positioned on a substantially transparent substrate (72). In one embodiment, the stripes are spaced apart by equal distances (78) and are of increasing widths (76a-76c) that correspond to the orders of diffraction of the Fourier transform pattern (45) produced by the Fourier transform lens. The spatial filter can be used to filter light spots forming a Fourier transform pattern for specimens having repetitive pattern sizes included within a specified range of sizes.

摘要翻译： 在用于检测具有重复图案（16）的样本（14）中的缺陷的成像系统（10）中，空间滤波器（50）接收由傅立叶变换透镜（34）产生的空间频谱，并且阻止预选的空间频率分量 其中。 空间滤光器包括位于基本上透明的基板（72）上的基本上平行的不透明条纹阵列（70a-70c）。 在一个实施例中，条纹间隔开等距离（78），并且具有与傅立叶变换透镜产生的傅立叶变换图案（45）的衍射级相对应的宽度增加的宽度（76a-76c）。 空间滤波器可以用于过滤形成傅立叶变换图案的光点，用于具有指定尺寸范围内的重复图案尺寸的样本。

公开(公告)号：US5277701A

公开(公告)日：1994-01-11

申请号：US792814

申请日：1991-11-15

申请人： Douglas J. Christie ,  Robert B. Howe

发明人： Douglas J. Christie ,  Robert B. Howe

IPC分类号： A61M1/36 ,  A61M37/00

CPC分类号： A61M1/3679 ,  A61M2202/0415 ,  A61M2202/0417

摘要： The invention provides a therapeutic method for treating refractoriness to platelet transfusion by isolating blood serum from an alloimmunized patient undergoing platelet transfusion therapy, passing the serum through a bed comprising staphococcal protein A coupled to a solid support and returning the treated plasma to the patient. The method can be conducted by batch-type procedure or by continuously conducting the steps so that blood is withdrawn, passed through the bed, and returned to the patient as a continuous stream. The method is useful to treat alloimmunized patients suffering from leukemia, aplastic anemia, myelofibrosis, myelodysplastic syndrome, or in a bone marrow transplant patient.

摘要翻译： 本发明提供了一种治疗方法，用于通过分离来自接受血小板输注治疗的同种异体免疫的患者的血清，将血清通过包含与固体支持物结合的吻合蛋白A的床并将治疗的血浆返回给患者的血液进行血小板输注的不良反应。 该方法可以通过间歇式方法进行，或通过连续进行步骤，使得血液被抽出，通过床，并作为连续流返回给患者。 该方法可用于治疗患有白血病，再生障碍性贫血，骨髓纤维化，骨髓增生异常综合征或骨髓移植患者的同种异体免疫的患者。