公开(公告)号：US11286934B2

公开(公告)日：2022-03-29

申请号：US16464721

申请日：2017-11-23

申请人： Leybold GmbH

发明人： Max Pelikan ,  Raffaello Ghislotti ,  Dirk Schiller ,  Daniel Reinhard

IPC分类号： F04C25/02 ,  F04C27/02 ,  F04C28/02 ,  F04C28/08 ,  F04C23/00 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06 ,  F04D17/16 ,  F04D19/04

摘要： A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

公开(公告)号：US20230033429A1

公开(公告)日：2023-02-02

申请号：US17672536

申请日：2022-02-15

申请人： Leybold GmbH

发明人： Max Pelikan ,  Raffaello Ghislotti ,  Dirk Schiller ,  Daniel Reinhard

IPC分类号： F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C23/00 ,  F04C27/02 ,  F04B37/14 ,  F04B41/06

摘要： A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.