公开(公告)号：US20230073927A1

公开(公告)日：2023-03-09

申请号：US18054989

申请日：2022-11-14

Applicant: Lumentum Operations LLC

Inventor： Shibnath PATHAK ,  Duanhua KONG ,  Michael C. LARSON ,  Amit MIZRAHI

IPC: H01S5/024 ,  H01S5/068 ,  H01S5/22 ,  H01S5/06

Abstract: In some implementations, a thermally-controlled photonic structure may include a suspended region that is suspended over a substrate; a plurality of bridge elements connected to the suspended region and configured to suspend the suspended region over the substrate, where a plurality of openings are defined between the plurality of bridge elements; and at least one heater element having a modulated width disposed on the suspended region. The at least one heater element having the modulated width may include at least one section of a greater width and at least one section of a lesser width. The at least one section of the greater width may be in alignment with an opening of the plurality of openings and the at least one section of the lesser width may be in alignment with a bridge element of the plurality of bridge elements.

公开(公告)号：US20210344166A1

公开(公告)日：2021-11-04

申请号：US17032787

申请日：2020-09-25

Applicant: Lumentum Operations LLC

Inventor： Shibnath PATHAK ,  Duanhua KONG ,  Michael C. LARSON ,  Amit MIZRAHI

IPC: H01S5/068 ,  H01S5/06 ,  H01S5/22

Abstract: In some implementations, a thermally-controlled photonic structure may include a suspended region that is suspended over a substrate; a plurality of bridge elements connected to the suspended region and configured to suspend the suspended region over the substrate, where a plurality of openings are defined between the plurality of bridge elements; and at least one heater element having a modulated width disposed on the suspended region. The at least one heater element having the modulated width may include at least one section of a greater width and at least one section of a lesser width. The at least one section of the greater width may be in alignment with an opening of the plurality of openings and the at least one section of the lesser width may be in alignment with a bridge element of the plurality of bridge elements.