公开(公告)号：US3917401A

公开(公告)日：1975-11-04

申请号：US52397074

申请日：1974-11-15

Applicant: MC DONNELL DOUGLAS CORP

Inventor： STOLWYK CARL F

IPC: G03F7/20 ,  G03B27/42

CPC classification number: G03F7/70425 ,  G03F7/70791

Abstract: Apparatus for the accurate placement of the conductive members and electrodes of acoustic surface wave devices formed on the surface of a substrate such as a piezoelectric substrate including means for mounting the substrate for movement on the movable base portion of a camera device, said substrate having a conductive input transducer formed thereon, but being without any conductive electrodes. The apparatus includes a pick-up sensor mounted externally of the movable base in position adjacent to the substrate, and means responsive to a reference signal of the same frequency as the frequency at which the acoustic surface wave device being constructed is to operate for driving and accurately locating the movable members including the movable camera base. The apparatus includes a phasemeter which is used to accurately reposition the table (camera base) to each succeeding electrode image position so that the relative phase of all electrodes of the acoustic surface wave device is assured, a condition made possible by the present apparatus inasmuch as the photomasks employed are also prepared under control of similar step and repeat control means. The apparatus may alternatively employ means to count the cycles of the RF signal as the table is moved.

Abstract translation: 用于精确放置形成在诸如压电基板的基板的表面上的声表面波装置的导电部件和电极的装置，包括用于将基板安装在相机装置的可移动基部上的装置，所述基板具有 导电输入传感器形成在其上，但没有任何导电电极。 该装置包括安装在可移动底座的外部位于相邻于基板的位置的拾取传感器，以及响应于与正在构造的声表面波装置用于驱动的​​频率相同频率的参考信号的装置，以及 精确地定位包括可移动照相机底座的可动构件。 该装置包括用于将表（摄像机基座）精确地重新定位到每个后续电极图像位置的相位仪，使得保证声表面波装置的所有电极的相对相位，本设备可以实现的条件是 所采用的光掩模也是在类似步骤和重复控制方法的控制下制备的。 该装置可以替代地采用在桌子移动时对RF信号的周期进行计数的装置。