公开(公告)号：US20160190958A1

公开(公告)日：2016-06-30

申请号：US14586307

申请日：2014-12-30

Applicant: MEMS DRIVE, INC.

Inventor： Roman GUTIERREZ ,  Hongyu Wang

IPC: H02N1/00 ,  B81B7/00

CPC classification number: H02N1/008 ,  B81B7/008

Abstract: Systems and methods provide actuator control. Actuator control is provided via charge control as opposed to voltage control. A driver for driving an actuator can include a charge pump for injecting charge into one or more capacitive elements of the actuator. The driver can further include a capacitance detection aspect for detecting the capacitance of the capacitive elements of the actuator to determine positioning of the actuator.

Abstract translation: 系统和方法提供执行器控制。 通过充电控制提供执行器控制，而不是电压控制。 用于驱动致动器的驱动器可以包括用于将电荷注入致动器的一个或多个电容元件的电荷泵。 驱动器还可以包括用于检测致动器的电容元件的电容的电容检测方面，以确定致动器的定位。

公开(公告)号：US20170190568A1

公开(公告)日：2017-07-06

申请号：US14985175

申请日：2015-12-30

Applicant: MEMS DRIVE, INC.

Inventor： Gerardo MORABITO ,  Xiaolei LIU ,  Guiqin WANG ,  Roman GUTIERREZ ,  Matthew NG

IPC: B81B3/00 ,  H02N1/00

CPC classification number: B81B3/0051 ,  B81B7/0016 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/0136 ,  H02N1/006

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.