公开(公告)号：US20200152856A1

公开(公告)日：2020-05-14

申请号：US16679219

申请日：2019-11-10

Applicant: MEMS Drive, Inc.

Inventor： Guiqin Wang ,  Xiaolei Liu ,  Mahmood Samiee ,  Yufeng Wang

IPC: H01L41/09 ,  H01L41/253 ,  H01L41/29 ,  H01L41/317 ,  H01L41/316 ,  H01L41/332

Abstract: A method of generating a piezoelectric actuator includes: forming a piezoelectric member upon a rigid substrate; and removing one or more portions of the rigid substrate to form one or more gaps in the rigid substrate, thus defining at least one deformable portion of the piezoelectric member and at least one rigid portion of the piezoelectric member