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公开(公告)号:US11502240B2
公开(公告)日:2022-11-15
申请号:US16750023
申请日:2020-01-23
Applicant: META PLATFORMS TECHNOLOGIES, LLC
Inventor: Kenneth Diest , Andrew John Ouderkirk , Renate Eva Klementine Landig , Katherine Marie Smyth , Spencer Allan Wells , Tingling Rao , Sheng Ye , Eric Schmitt , Nagi Elabbasi , Bachir Ahmed Abeid
IPC: H01L41/45 , H01L41/09 , H01L41/083 , H01L41/29 , H01L41/047 , H01L41/33 , H01L41/193
Abstract: An actuator assembly includes a primary electrode, a secondary electrode overlapping at least a portion of the primary electrode, and an electroactive polymer layer disposed between the primary electrode and the secondary electrode, where the electroactive polymer layer includes a non-vertical (e.g., sloped) sidewall with respect to a major surface of at least one of the electrodes. The electroactive polymer layer may be characterized by a non-axisymmetric shape with respect to an axis that is oriented orthogonal to an electrode major surface.