公开(公告)号：US11700489B1

公开(公告)日：2023-07-11

申请号：US17470744

申请日：2021-09-09

Applicant: META PLATFORMS TECHNOLOGIES, LLC

Inventor： Scott Porter ,  Chuming Zhao ,  Antonio John Miller ,  Peter Daniel Clyde

IPC: H04R25/00 ,  H04R9/06 ,  H01F7/08 ,  H01F7/126 ,  H04R9/02 ,  H04R19/02

CPC classification number: H04R9/06 ,  H01F7/081 ,  H01F7/126 ,  H04R9/025 ,  H04R19/02 ,  H04R2201/003 ,  H04R2460/13

Abstract: A microelectromechanical system (MEMS) coil assembly is presented herein. In some embodiments, the MEMS coil assembly includes a foldable substrate and a plurality of coil segments. Each coil segment includes a portion of the substrate, two conductors arranged on the portion of the substrate. The substrate can be folded to stack the coil segments on top of each other and to electrically connect first and second conductors of adjacent coil segments. In some other embodiments, the MEMS coil assembly includes a plurality of coil layers stacked onto each other. Each coil layer includes a substrate and a conductor to form a coil. The conductors of adjacent coil layers are connected through a via. The MEMS coil assembly can be arranged between a pair of magnets. An input signal can be applied to the MEMS coil assembly to cause the MEMS coil assembly to move orthogonally relative to the magnets.