公开(公告)号：US6413319B2

公开(公告)日：2002-07-02

申请号：US73149900

申请日：2000-12-07

Applicant: MICRON TECHNOLOGY INC

Inventor： STRODTBECK TIMOTHY A

IPC: B05D1/28 ,  B05D3/12 ,  B05C11/00

CPC classification number: B82Y30/00 ,  B05D1/283 ,  B05D3/12 ,  B82Y40/00

Abstract: A process and apparatus for processing a monolayer film and transferring the monolayer film to a substrate are provided. In accordance with one embodiment of the present invention, a process for transferring a monolayer film to a substrate is provided comprising the steps of: (i) providing a water-based: carrier media defining an upper surface; (ii) introducing process particles on the upper surface of the carrier media, wherein the molecules are dissolved in a solvent and the particles and the solvent are insoluble in the carrier media; (iii) evaporating the solvent such that a non-cohesive monolayer film of the particles is formed on the upper surface of the carrier media; (iv) decreasing a degree of void incorporation in the monolayer film of particles by compressing a dimension of the non-cohesive film along the upper surface of the carrier media, and sonicating the carrier media to form micro-bubbles in the carrier media, wherein the compression and the sonication contribute to a decreased degree of void incorporation in the film of process particles; and (v) transferring the film of particles to a surface of the substrate. The steps of compressing and sonicating may be executed concurrently.

Abstract translation: 提供了用于处理单层膜并将单层膜转移到基底的方法和设备。 根据本发明的一个实施例，提供了将单层膜转移到基底的方法，包括以下步骤：（i）提供限定上表面的水基载体介质; （ii）在载体介质的上表面上引入工艺颗粒，其中分子溶解在溶剂中，颗粒和溶剂不溶于载体介质中; （iii）蒸发溶剂，使得在载体介质的上表面上形成颗粒的非粘性单层膜; （iv）通过沿所述载体介质的上表面压缩所述非粘性膜的尺寸，并超声处理所述载体介质以在所述载体介质中形成微气泡，从而降低所述单层膜中的空隙结合度，其中 压缩和超声处理有助于在工艺颗粒的膜中降低空隙掺入程度; 和（v）将颗粒膜转移到基底的表面。 压缩和声波处理的步骤可以同时执行。