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公开(公告)号：US3315103A
公开(公告)日：1967-04-18
申请号：US33697364
申请日：1964-01-10
Applicant: MIDWESTERN INSTR INC
Inventor： DUFF BILLY E , HUGHES REX D
CPC classification number: H02N2/10 , G05D3/10 , H01L41/083
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